Shannon Spencer

Follow

Person

Huber Heights, OH, US

People

Patents Grantslast 30 patents

Information Patent Grant
Showerhead electrodes
- Patent number 8,268,117
- Issue date Sep 18, 2012
- Lam Research Corporation
- Greg Bettencourt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead electrode assemblies and plasma processing chambers inco...
- Patent number 8,152,954
- Issue date Apr 10, 2012
- Lam Research Corporation
- Greg Bettencourt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrode/probe assemblies and plasma processing chambers incorpora...
- Patent number 8,043,470
- Issue date Oct 25, 2011
- Lam Research Corporation
- Randall A. Hardin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SHOWERHEAD ELECTRODES
- Publication number 20120160941
- Publication date Jun 28, 2012
- LAM RESEARCH CORPORATION
- Greg Bettencourt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE/PROBE ASSEMBLIES AND PLASMA PROCESSING CHAMBERS INCORPORA...
- Publication number 20090126633
- Publication date May 21, 2009
- LAM RESEARCH CORPORATION
- Randall A. Hardin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ELECTRODE ASSEMBLIES AND PLASMA PROCESSING CHAMBERS INCO...
- Publication number 20090095424
- Publication date Apr 16, 2009
- LAM RESEARCH CORPORATION
- Greg Bettencourt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma etching chamber parts made with EDM
- Publication number 20070284339
- Publication date Dec 13, 2007
- David O. Moore
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR