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Shannon W. Dunn
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Altamont, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Double patterning with inline critical dimension slimming
Patent number
8,940,475
Issue date
Jan 27, 2015
Tokyo Electron Limited
Shannon W. Dunn
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Sidewall image transfer pitch doubling and inline critical dimensio...
Patent number
8,764,999
Issue date
Jul 1, 2014
Tokyo Electron Limited
Shannon W. Dunn
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Vapor treatment process for pattern smoothing and inline critical d...
Patent number
8,647,817
Issue date
Feb 11, 2014
Tokyo Electron Limited
Shannon W. Dunn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for preparing alignment mark for multiple patterning
Patent number
8,507,190
Issue date
Aug 13, 2013
Tokyo Electron Limited
Shannon W. Dunn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
High normality solution for removing freeze material in lithographi...
Patent number
8,389,206
Issue date
Mar 5, 2013
Tokyo Electron Limited
Shannon W. Dunn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of double patterning a thin film using a developable anti-re...
Patent number
7,932,017
Issue date
Apr 26, 2011
Tokyo Electron Limited
Shannon W. Dunn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for double patterning a thin film
Patent number
7,883,835
Issue date
Feb 8, 2011
Tokyo Electron Limited
Sandra L. Hyland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for double patterning a developable anti-reflective coating
Patent number
7,862,985
Issue date
Jan 4, 2011
Tokyo Electron Limited
Shannon W. Dunn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for double imaging a developable anti-reflective coating
Patent number
7,858,293
Issue date
Dec 28, 2010
Tokyo Electron Limited
Shannon W. Dunn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of patterning an anti-reflective coating by partial developing
Patent number
7,811,747
Issue date
Oct 12, 2010
Tokyo Electron Limited
Sandra L. Hyland
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of patterning an organic planarization layer
Patent number
7,767,386
Issue date
Aug 3, 2010
Tokyo Electron Limited
Shannon W. Dunn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a dual damascene structure utilizing a developabl...
Patent number
7,432,191
Issue date
Oct 7, 2008
Tokyo Electron Limited
Harlan D. Stamper
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
VAPOR TREATMENT PROCESS FOR PATTERN SMOOTHING AND INLINE CRITICAL D...
Publication number
20130171571
Publication date
Jul 4, 2013
TOKYO ELECTRON LIMITED
Shannon W. DUNN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SIDEWALL IMAGE TRANSFER PITCH DOUBLING AND INLINE CRITICAL DIMENSIO...
Publication number
20120128935
Publication date
May 24, 2012
TOKYO ELECTRON LIMITED
Shannon W. DUNN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DOUBLE PATTERNING WITH INLINE CRITICAL DIMENSION SLIMMING
Publication number
20120128942
Publication date
May 24, 2012
TOKYO ELECTRON LIMITED
Shannon W. DUNN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for preparing alignment mark for multiple patterning
Publication number
20120034557
Publication date
Feb 9, 2012
TOKYO ELECTRON LIMITED
Shannon W. Dunn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
High normality solution for removing freeze material in lithographi...
Publication number
20110070545
Publication date
Mar 24, 2011
TOKYO ELECTRON LIMITED
Shannon W. DUNN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF FORMING A DUAL DAMASCENE STRUCTURE UTILIZING A DEVELOPABL...
Publication number
20080241763
Publication date
Oct 2, 2008
TOKYO ELECTRON LIMITED
Harlan Stamper
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PATTERNING AN ORGANIC PLANARIZATION LAYER
Publication number
20080171269
Publication date
Jul 17, 2008
TOKYO ELECTRON LIMITED
Shannon W. Dunn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF DOUBLE PATTERNING A THIN FILM USING A DEVELOPABLE ANTI-RE...
Publication number
20080171293
Publication date
Jul 17, 2008
TOKYO ELECTRON LIMITED
Shannon W. Dunn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF PATTERNING AN ANTI-REFLECTIVE COATING BY PARTIAL ETCHING
Publication number
20080073321
Publication date
Mar 27, 2008
TOKYO ELECTRON LIMITED
Sandra L. Hyland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DOUBLE PATTERNING A THIN FILM
Publication number
20080076075
Publication date
Mar 27, 2008
TOKYO ELECTRON LIMITED
Sandra L. Hyland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PATTERNING AN ANTI-REFLECTIVE COATING BY PARTIAL DEVELOPING
Publication number
20080076069
Publication date
Mar 27, 2008
TOKYO ELECTRON LIMITED
Sandra L. Hyland
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DOUBLE IMAGING A DEVELOPABLE ANTI-REFLECTIVE COATING
Publication number
20080076073
Publication date
Mar 27, 2008
TOKYO ELECTRON LIMITED
Shannon W. Dunn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DOUBLE PATTERNING A DEVELOPABLE ANTI-REFLECTIVE COATING
Publication number
20080076074
Publication date
Mar 27, 2008
TOKYO ELECTRON LIMITED
Shannon W. Dunn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY