Shanyu Wang

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Processing of workpieces using fluorocarbon plasma
- Patent number 11,651,977
- Issue date May 16, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Shanyu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing of workpieces using deposition process and etch process
- Patent number 11,462,413
- Issue date Oct 4, 2022
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Shanyu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ozone treatment for selective silicon nitride etch over silicon
- Patent number 11,043,393
- Issue date Jun 22, 2021
- Mattson Technology, Inc.
- Shanyu Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Processing of Workpieces Using Flourocarbon Plasma
- Publication number 20210305071
- Publication date Sep 30, 2021
- Mattson Technology, Inc.
- Shanyu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing Of Workpieces Using Deposition Process And Etch Process
- Publication number 20210020445
- Publication date Jan 21, 2021
- Mattson Technology, Inc.
- Shanyu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ozone Treatment for Selective Silicon Nitride Etch Over Silicon
- Publication number 20200234969
- Publication date Jul 23, 2020
- Mattson Technology, Inc.
- Shanyu Wang
- H01 - BASIC ELECTRIC ELEMENTS