Shao Beng LAW

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and methods for cleaning and drying of wafers
- Patent number 8,177,993
- Issue date May 15, 2012
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Boon Meng Seah
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHODS FOR CLEANING AND DRYING OF WAFERS
- Publication number 20120255586
- Publication date Oct 11, 2012
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Boon Meng SEAH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and methods for Cleaning and Drying of wafers
- Publication number 20080105653
- Publication date May 8, 2008
- Boon Meng Seah
- H01 - BASIC ELECTRIC ELEMENTS