Shao-Shuo Wu

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Changhua County, TW

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Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR CLEANING A PRE-CLEAN PROCESS CHAMBER
- Publication number 20240384402
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Ting Tsai
- B08 - CLEANING
Information Patent Application
SYSTEM AND METHOD FOR CLEANING A PRE-CLEAN PROCESS CHAMBER
- Publication number 20230017955
- Publication date Jan 19, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Ting Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...