Shao Wei Ku

Person

Hsinchu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for processing substrate in semiconductor fabrica...
- Patent number 12,090,527
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Syuan Jhuan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist removal
- Patent number 11,664,235
- Issue date May 30, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Shang-Yuan Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method of removing photoresist layer
- Patent number 11,090,696
- Issue date Aug 17, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jui-Chuan Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for processing substrate in semiconductor fabrication
- Patent number 10,780,461
- Issue date Sep 22, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Syuan Jhuan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated platform for improved wafer manufacturing quality
- Patent number 10,497,557
- Issue date Dec 3, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shao-Yen Ku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor apparatus and method of removing photoresist layer on...
- Patent number 10,486,204
- Issue date Nov 26, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jui-Chuan Chang
- B08 - CLEANING
Information Patent Grant
Method for forming semiconductor device structure
- Patent number 10,276,469
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Weibo Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical dispense system with reduced contamination
- Patent number 10,161,545
- Issue date Dec 25, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Rong-Shyan Pan
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Methods for transporting wafers between wafer holders and chambers
- Patent number 9,997,384
- Issue date Jun 12, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shao-Yen Ku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning composition and method for semiconductor device fabrication
- Patent number 9,881,816
- Issue date Jan 30, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Wen Li
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Photoresist removal
- Patent number 9,805,946
- Issue date Oct 31, 2017
- Taiwan Semiconductor Manufacturing Company Limited
- Shang-Yuan Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer cleaning
- Patent number 9,781,994
- Issue date Oct 10, 2017
- Taiwan Semiconductor Manufacturing Company Limited
- Shang-Yuan Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for movable megasonic wafer probe
- Patent number 9,764,364
- Issue date Sep 19, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Hsueh Chang Chien
- B08 - CLEANING
Information Patent Grant
Aqueous cleaning techniques and compositions for use in semiconduct...
- Patent number 9,728,533
- Issue date Aug 8, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Li Chou
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method for controlling surface charge on wafer surface in semicondu...
- Patent number 9,704,714
- Issue date Jul 11, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Weibo Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transport method
- Patent number 9,601,360
- Issue date Mar 21, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jyun-Chao Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching and cleaning wafers
- Patent number 9,583,352
- Issue date Feb 28, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chang Tsai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Chemical dispense system with reduced contamination
- Patent number 9,494,261
- Issue date Nov 15, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Rong-Shyan Pan
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Mechanisms for cleaning wafer and scrubber
- Patent number 9,478,444
- Issue date Oct 25, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tai-Liang Lyu
- B08 - CLEANING
Information Patent Grant
Mechanisms for wafer cleaning
- Patent number 9,349,617
- Issue date May 24, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shang-Yuan Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacture
- Patent number 9,263,337
- Issue date Feb 16, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Li Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loading port, system for etching and cleaning wafers and method of use
- Patent number 9,136,149
- Issue date Sep 15, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chang Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for energized and pressurized liquids for cleanin...
- Patent number 9,117,760
- Issue date Aug 25, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Yen Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated platform for improved wafer manufacturing quality
- Patent number 9,064,807
- Issue date Jun 23, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shao-Yen Ku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus to improve internal wafer temperature profile
- Patent number 9,048,089
- Issue date Jun 2, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Yen Hsu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and methods for movable megasonic wafer probe
- Patent number 8,926,762
- Issue date Jan 6, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Hsueh Chang Chien
- B08 - CLEANING
Information Patent Grant
Aqueous cleaning techniques and compositions for use in semiconduct...
- Patent number 8,916,429
- Issue date Dec 23, 2014
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Li Chou
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Integrated apparatus to assure wafer quality and manufacturability
- Patent number 8,616,821
- Issue date Dec 31, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shao-Yen Ku
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Cleaning process for semiconductor device fabrication
- Patent number 8,518,634
- Issue date Aug 27, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Hsi Yeh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Nitride film wet stripping
- Patent number 8,105,851
- Issue date Jan 31, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shao-Yen Ku
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR PROCESSING SUBSTRATE IN SEMICONDUCTOR FABRICA...
- Publication number 20200316654
- Publication date Oct 8, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Syuan JHUAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD OF REMOVING PHOTORESIST LAYER
- Publication number 20200094298
- Publication date Mar 26, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chuan CHANG
- B08 - CLEANING
Information Patent Application
PHOTORESIST REMOVAL
- Publication number 20180047580
- Publication date Feb 15, 2018
- Taiwan Semiconductor Manufacturing Company Limited
- Shang-Yuan YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical Dispense System with Reduced Contamination
- Publication number 20170023158
- Publication date Jan 26, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Rong-Shyan Pan
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
METHOD AND SYSTEM FOR PROCESSING SUBSTRATE IN SEMICONDUCTOR FABRICA...
- Publication number 20160336200
- Publication date Nov 17, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Syuan JHUAN
- B08 - CLEANING
Information Patent Application
METHOD FOR CONTROLLING SURFACE CHARGE ON WAFER SURFACE IN SEMICONDU...
- Publication number 20160307757
- Publication date Oct 20, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Weibo YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE
- Publication number 20160307816
- Publication date Oct 20, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Weibo YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSPORT METHOD
- Publication number 20160276186
- Publication date Sep 22, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Jyun-Chao CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR APPARATUS AND METHOD OF REMOVING PHOTORESIST LAYER ON...
- Publication number 20160129484
- Publication date May 12, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chuan CHANG
- B08 - CLEANING
Information Patent Application
METHOD OF ETCHING AND CLEANING WAFERS
- Publication number 20150357198
- Publication date Dec 10, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chang TSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED PLATFORM FOR IMPROVED WAFER MANUFACTURING QUALITY
- Publication number 20150255270
- Publication date Sep 10, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Shao-Yen Ku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MECHANISMS FOR WAFER CLEANING
- Publication number 20150144159
- Publication date May 28, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Shang-Yuan YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Methods for Movable Megasonic Wafer Probe
- Publication number 20150107634
- Publication date Apr 23, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Hsueh Chang Chien
- B08 - CLEANING
Information Patent Application
AQUEOUS CLEANING TECHNIQUES AND COMPOSITIONS FOR USE IN SEMICONDUCT...
- Publication number 20150108578
- Publication date Apr 23, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Li Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST REMOVAL
- Publication number 20150064928
- Publication date Mar 5, 2015
- Taiwan Semiconductor Manufacturing Company Limited
- Shang-Yuan Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MECHANISMS FOR CLEANING WAFER AND SCRUBBER
- Publication number 20150027489
- Publication date Jan 29, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Tai-Liang LYU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for an Etch Process with Silicon Concentration Co...
- Publication number 20140273303
- Publication date Sep 18, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fu-Yi Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integrated Platform for Improved Wafer Manufacturing Quality
- Publication number 20140242804
- Publication date Aug 28, 2014
- Taiwan Semiconductor Manufacturing Co. Ltd.
- Shao-Yen Ku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus to Improve Internal Wafer Temperature Profile
- Publication number 20140224785
- Publication date Aug 14, 2014
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Yen Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical Dispense System with Reduced Contamination
- Publication number 20140224334
- Publication date Aug 14, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Rong-Shyan Pan
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
CLEANING COMPOSITION AND METHOD FOR SEMICONDUCTOR DEVICE FABRICATION
- Publication number 20140216499
- Publication date Aug 7, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Wen Li
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Single Wafer Cleaning Tool with H2SO4 Recycling
- Publication number 20140216500
- Publication date Aug 7, 2014
- Taiwan Semicunductor Manufacturing Co., Ltd.
- Chien-Wen Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR ENERGIZED AND PRESSURIZED LIQUIDS FOR CLEANIN...
- Publication number 20140213063
- Publication date Jul 31, 2014
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Yen HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CLEANING
- Publication number 20140158155
- Publication date Jun 12, 2014
- Taiwan Semiconductor Manufacturing Company Limited
- Shang-Yuan Yu
- A46 - BRUSHWARE
Information Patent Application
LOADING PORT, SYSTEM FOR ETCHING AND CLEANING WAFERS AND METHOD OF USE
- Publication number 20140141541
- Publication date May 22, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chang TSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Aqueous Cleaning Techniques and Compositions for use in Semiconduct...
- Publication number 20130288436
- Publication date Oct 31, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Li Chou
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Methods for Transporting Wafers Between Wafer Holders and Chambers
- Publication number 20130142594
- Publication date Jun 6, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shao-Yen Ku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Method of Manufacture
- Publication number 20130109140
- Publication date May 2, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Li Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Methods for Movable Megasonic Wafer Probe
- Publication number 20130056031
- Publication date Mar 7, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Hsueh Chang Chien
- B08 - CLEANING
Information Patent Application
CLEANING PROCESS FOR SEMICONDUCTOR DEVICE FABRICATION
- Publication number 20120202156
- Publication date Aug 9, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd., ("TSMC")
- Ming-Hsi Yeh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shao Wei Ku

Person

Patents Grantslast 30 patents

Method and system for processing substrate in semiconductor fabrica...

Photoresist removal

Apparatus and method of removing photoresist layer

Methods for processing substrate in semiconductor fabrication

Integrated platform for improved wafer manufacturing quality

Semiconductor apparatus and method of removing photoresist layer on...

Method for forming semiconductor device structure

Chemical dispense system with reduced contamination

Methods for transporting wafers between wafer holders and chambers

Cleaning composition and method for semiconductor device fabrication

Photoresist removal

Wafer cleaning

Apparatus and methods for movable megasonic wafer probe

Aqueous cleaning techniques and compositions for use in semiconduct...

Method for controlling surface charge on wafer surface in semicondu...

Wafer transport method

Method of etching and cleaning wafers

Chemical dispense system with reduced contamination

Mechanisms for cleaning wafer and scrubber

Mechanisms for wafer cleaning

Semiconductor device and method of manufacture

Loading port, system for etching and cleaning wafers and method of use

Method and system for energized and pressurized liquids for cleanin...

Integrated platform for improved wafer manufacturing quality

Apparatus to improve internal wafer temperature profile

Apparatus and methods for movable megasonic wafer probe

Aqueous cleaning techniques and compositions for use in semiconduct...

Integrated apparatus to assure wafer quality and manufacturability

Cleaning process for semiconductor device fabrication

Nitride film wet stripping

Patents Applicationslast 30 patents

METHOD AND SYSTEM FOR PROCESSING SUBSTRATE IN SEMICONDUCTOR FABRICA...

APPARATUS AND METHOD OF REMOVING PHOTORESIST LAYER

PHOTORESIST REMOVAL

Chemical Dispense System with Reduced Contamination

METHOD AND SYSTEM FOR PROCESSING SUBSTRATE IN SEMICONDUCTOR FABRICA...

METHOD FOR CONTROLLING SURFACE CHARGE ON WAFER SURFACE IN SEMICONDU...

METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE

WAFER TRANSPORT METHOD

SEMICONDUCTOR APPARATUS AND METHOD OF REMOVING PHOTORESIST LAYER ON...

METHOD OF ETCHING AND CLEANING WAFERS

INTEGRATED PLATFORM FOR IMPROVED WAFER MANUFACTURING QUALITY

MECHANISMS FOR WAFER CLEANING

Apparatus and Methods for Movable Megasonic Wafer Probe

AQUEOUS CLEANING TECHNIQUES AND COMPOSITIONS FOR USE IN SEMICONDUCT...

PHOTORESIST REMOVAL

MECHANISMS FOR CLEANING WAFER AND SCRUBBER

System and Method for an Etch Process with Silicon Concentration Co...

Integrated Platform for Improved Wafer Manufacturing Quality

Apparatus to Improve Internal Wafer Temperature Profile

Chemical Dispense System with Reduced Contamination

CLEANING COMPOSITION AND METHOD FOR SEMICONDUCTOR DEVICE FABRICATION

Single Wafer Cleaning Tool with H2SO4 Recycling

METHOD AND SYSTEM FOR ENERGIZED AND PRESSURIZED LIQUIDS FOR CLEANIN...

WAFER CLEANING

LOADING PORT, SYSTEM FOR ETCHING AND CLEANING WAFERS AND METHOD OF USE

Aqueous Cleaning Techniques and Compositions for use in Semiconduct...

Methods for Transporting Wafers Between Wafer Holders and Chambers

Semiconductor Device and Method of Manufacture

Apparatus and Methods for Movable Megasonic Wafer Probe

CLEANING PROCESS FOR SEMICONDUCTOR DEVICE FABRICATION