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Shanghai, CN
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last 30 patents
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Patent Grant
Precise positioning system for dual stage switching exposure
Patent number
8,027,028
Issue date
Sep 27, 2011
Shanghai Micro Electronics Equipment Co., Ltd.
Yingsheng Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
PRECISE POSITIONING SYSTEM FOR DUAL STAGE SWITCHING EXPOSURE
Publication number
20090219503
Publication date
Sep 3, 2009
SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
Yingsheng Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY