Shaoyu WANG

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Wafer processing device and method therefor
- Patent number 10,658,214
- Issue date May 19, 2020
- Shanghai Micro Electronics Equipment Co., Ltd.
- Gang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pre-alignment device and method for wafer
- Patent number 10,276,417
- Issue date Apr 30, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Gang Wang
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
PRE-ALIGNMENT DEVICE AND METHOD FOR WAFER
- Publication number 20180151400
- Publication date May 31, 2018
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Gang WANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WAFER PROCESSING DEVICE AND METHOD THEREFOR
- Publication number 20170345696
- Publication date Nov 30, 2017
- Gang WANG
- H01 - BASIC ELECTRIC ELEMENTS