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Shaoyu Wu
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Singapore, SG
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Patents Grants
last 30 patents
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Patent Grant
Method for reducing dishing in chemical mechanical polishing
Patent number
6,670,272
Issue date
Dec 30, 2003
Singapore Science Park II
Shaoyu Wu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method for reducing dishing in chemical mechanical polishing
Publication number
20030054649
Publication date
Mar 20, 2003
Shaoyu Wu
H01 - BASIC ELECTRIC ELEMENTS