Sharath Hegde

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Portland, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for selective CMP of polysilicon
- Patent number 7,723,234
- Issue date May 25, 2010
- Clarkson University
- Suryadevara V. Babu
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Method For Selective CMP Of Polysilicon
- Publication number 20080119051
- Publication date May 22, 2008
- Clarkson University
- Suryadevara V. Babu
- B81 - MICRO-STRUCTURAL TECHNOLOGY