Shardul S. Patel

Person

Chelmsford, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for optimizing full horizontal scanned beam dis...
- Patent number 12,191,113
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Tyler Wills
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source having different modes of operation
- Patent number 12,154,766
- Issue date Nov 26, 2024
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid ion source for aluminum ion generation using a target holder...
- Patent number 12,094,681
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid ion source for aluminum ion generation using organoaluminium...
- Patent number 12,040,154
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cryogenically cooled rotatable electrostatic chuck
- Patent number 11,149,345
- Issue date Oct 19, 2021
- Applied Materials, Inc.
- Shardul Patel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cryogenic ferrofluid sealed rotary union
- Patent number 10,704,693
- Issue date Jul 7, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Robert Mitchell
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
SiC coating in an ion implanter
- Patent number 9,793,086
- Issue date Oct 17, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Robert J. Mason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
SiC coating in an ion implanter
- Patent number 9,384,937
- Issue date Jul 5, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Robert J. Mason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid electrostatic lens with increased natural frequency
- Patent number 8,907,295
- Issue date Dec 9, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Oliver V. Naumovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for improving extracted ion beam quality using high-tran...
- Patent number 8,466,431
- Issue date Jun 18, 2013
- Varian Semiconductor Equipment Associates, Inc.
- James S. Buff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for controlling the temperature of an RF ion source window
- Patent number 8,436,318
- Issue date May 7, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled ion source
- Patent number 8,188,448
- Issue date May 29, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Victor Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled ion source
- Patent number 8,183,542
- Issue date May 22, 2012
- Varion Semiconductor Equipment Associates, Inc.
- Victor Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling beam current uniformity in an...
- Patent number 8,003,956
- Issue date Aug 23, 2011
- Varian Semiconductor Equipment Associates, Inc.
- D. Jeffrey Lischer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION SOURCE HAVING DIFFERENT MODES OF OPERATION
- Publication number 20230395357
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR OPTIMIZING FULL HORIZONTAL SCANNED BEAM DIS...
- Publication number 20230386785
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Tyler Wills
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING A TARGET HOLDER...
- Publication number 20230369006
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING A TARGET HOLDER...
- Publication number 20230369008
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING ORGANOALUMINIUM...
- Publication number 20230369007
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cryogenic Ferrofluid Sealed Rotary Union
- Publication number 20190301616
- Publication date Oct 3, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Robert Mitchell
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
CRYOGENICALLY COOLED ROTATABLE ELECTROSTATIC CHUCK
- Publication number 20190181028
- Publication date Jun 13, 2019
- SHARDUL PATEL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SiC Coating In an Ion Implanter
- Publication number 20160293378
- Publication date Oct 6, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Robert J. Mason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SiC Coating In An Ion Implanter
- Publication number 20150090897
- Publication date Apr 2, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Robert J. Mason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID ELECTROSTATIC LENS WITH INCREASED NATURAL FREQUENCY
- Publication number 20150048254
- Publication date Feb 19, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Oliver V. Naumovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID ELECTROSTATIC LENS WITH INCREASED NATURAL FREQUENCY
- Publication number 20140034843
- Publication date Feb 6, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Oliver V. Naumovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR CONTROLLING THE TEMPERATURE OF AN RF ION SOURCE WINDOW
- Publication number 20110240876
- Publication date Oct 6, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROLLED ION SOURCE
- Publication number 20110240878
- Publication date Oct 6, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Victor Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROLLED ION SOURCE
- Publication number 20110240877
- Publication date Oct 6, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Victor Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR IMPROVING EXTRACTED ION BEAM QUALITY USING HIGH-TRAN...
- Publication number 20100200768
- Publication date Aug 12, 2010
- Varian Semiconductor Equipment Associates, Inc.
- JAMES BUFF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING BEAM CURRENT UNIFORMITY IN AN...
- Publication number 20100084582
- Publication date Apr 8, 2010
- Varian Semiconductor Equipment Associates, Inc.
- D. Jeffrey LISCHER
- H01 - BASIC ELECTRIC ELEMENTS

Shardul S. Patel

Person

Patents Grantslast 30 patents

Systems and methods for optimizing full horizontal scanned beam dis...

Ion source having different modes of operation

Hybrid ion source for aluminum ion generation using a target holder...

Hybrid ion source for aluminum ion generation using organoaluminium...

Cryogenically cooled rotatable electrostatic chuck

Cryogenic ferrofluid sealed rotary union

SiC coating in an ion implanter

SiC coating in an ion implanter

Hybrid electrostatic lens with increased natural frequency

Techniques for improving extracted ion beam quality using high-tran...

Apparatus for controlling the temperature of an RF ion source window

Temperature controlled ion source

Temperature controlled ion source

Method and apparatus for controlling beam current uniformity in an...

Patents Applicationslast 30 patents

ION SOURCE HAVING DIFFERENT MODES OF OPERATION

SYSTEMS AND METHODS FOR OPTIMIZING FULL HORIZONTAL SCANNED BEAM DIS...

HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING A TARGET HOLDER...

HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING A TARGET HOLDER...

HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING ORGANOALUMINIUM...

Cryogenic Ferrofluid Sealed Rotary Union

CRYOGENICALLY COOLED ROTATABLE ELECTROSTATIC CHUCK

SiC Coating In an Ion Implanter

SiC Coating In An Ion Implanter

HYBRID ELECTROSTATIC LENS WITH INCREASED NATURAL FREQUENCY

HYBRID ELECTROSTATIC LENS WITH INCREASED NATURAL FREQUENCY

APPARATUS FOR CONTROLLING THE TEMPERATURE OF AN RF ION SOURCE WINDOW

TEMPERATURE CONTROLLED ION SOURCE

TEMPERATURE CONTROLLED ION SOURCE

TECHNIQUES FOR IMPROVING EXTRACTED ION BEAM QUALITY USING HIGH-TRAN...

METHOD AND APPARATUS FOR CONTROLLING BEAM CURRENT UNIFORMITY IN AN...