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SiC coating in an ion implanter
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Patent number 9,793,086
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Issue date Oct 17, 2017
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Varian Semiconductor Equipment Associates, Inc.
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Robert J. Mason
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H01 - BASIC ELECTRIC ELEMENTS
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SiC coating in an ion implanter
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Patent number 9,384,937
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Issue date Jul 5, 2016
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Varian Semiconductor Equipment Associates, Inc.
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Robert J. Mason
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H01 - BASIC ELECTRIC ELEMENTS
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Temperature controlled ion source
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Patent number 8,188,448
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Issue date May 29, 2012
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Varian Semiconductor Equipment Associates, Inc.
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Victor Benveniste
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H01 - BASIC ELECTRIC ELEMENTS
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Temperature controlled ion source
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Patent number 8,183,542
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Issue date May 22, 2012
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Varion Semiconductor Equipment Associates, Inc.
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Victor Benveniste
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H01 - BASIC ELECTRIC ELEMENTS
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