Sharon M. Szelag

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Lynnfield, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for repairing lithography masks using a charge...
- Patent number 6,709,554
- Issue date Mar 23, 2004
- FEI Company
- David C. Ferranti
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for repairing lithography masks using a charge...
- Publication number 20010027917
- Publication date Oct 11, 2001
- David C. Ferranti
- H01 - BASIC ELECTRIC ELEMENTS