Shashank C. Deshmukh

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San Ramon, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methodology for cleaning of surface metal contamination from an upp...
- Patent number 9,079,228
- Issue date Jul 14, 2015
- Lam Research Corporation
- Hong Shih
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
METHODOLOGY FOR CLEANING OF SURFACE METAL CONTAMINATION FROM AN UPP...
- Publication number 20110146704
- Publication date Jun 23, 2011
- LAM RESEARCH CORPORATION
- Hong Shih
- B08 - CLEANING