Shau-Yi Chen

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Hsinchu, TW

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Patents Applicationslast 30 patents

Information Patent Application
SHOWERHEAD AND A THIN-FILM DEPOSITION APPARATUS CONTAINING THE SAME
- Publication number 20170002463
- Publication date Jan 5, 2017
- EPISTAR CORPORATION
- Nai-Wen Fan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...