Shaun Smith

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Malden, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Polygonal toroidal plasma source
- Patent number 10,553,403
- Issue date Feb 4, 2020
- MKS Instruments, Inc.
- Paul Michael Meneghini
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for plasma ignition with a self-resonating device
- Patent number 10,076,020
- Issue date Sep 11, 2018
- MKS Instruments, Inc.
- Shaun T. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for plasma ignition with a self-resonating device
- Patent number 9,736,920
- Issue date Aug 15, 2017
- MKS Instruments, Inc.
- Shaun T. Smith
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PHOTOELECTRON ASSISTED PLASMA IGNITION
- Publication number 20230207274
- Publication date Jun 29, 2023
- LAM RESEARCH CORPORATION
- Lee CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method for Plasma Ignition with a Self-Resonating Device
- Publication number 20170303382
- Publication date Oct 19, 2017
- MKS Instruments Inc.
- Shaun T. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method for Metastable Enhanced Plasma Ignition
- Publication number 20160233055
- Publication date Aug 11, 2016
- MKS Instruments Inc.
- Shaun Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method for Plasma Ignition with a Self-Resonating Device
- Publication number 20160234924
- Publication date Aug 11, 2016
- MKS Instruments Inc.
- Shaun T. Smith
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR