Shaunak MUKHERJEE

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for depositing low-k dielectric films
- Patent number 12,198,925
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Shaunak Mukherjee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for depositing low-k dielectric films
- Patent number 11,594,409
- Issue date Feb 28, 2023
- Applied Materials, Inc.
- Shaunak Mukherjee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-k dielectric films
- Patent number 11,393,678
- Issue date Jul 19, 2022
- Applied Materials, Inc.
- William J. Durand
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low-k dielectric with self-forming barrier layer
- Patent number 11,289,369
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Yi Ding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
SiBN film for conformal hermetic dielectric encapsulation without d...
- Patent number 11,011,371
- Issue date May 18, 2021
- Applied Materials, Inc.
- Milind Gadre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High deposition rate and high quality nitride
- Patent number 10,790,140
- Issue date Sep 29, 2020
- Applied Materials, Inc.
- Xinhai Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selectively lateral growth of silicon oxide thin film
- Patent number 10,002,757
- Issue date Jun 19, 2018
- Applied Materials, Inc.
- Yihong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selectively lateral growth of silicon oxide thin film
- Patent number 9,741,558
- Issue date Aug 22, 2017
- Applied Materials, Inc.
- Yihong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selectively lateral growth of silicon oxide thin film
- Patent number 9,508,545
- Issue date Nov 29, 2016
- Applied Materials, Inc.
- Yihong Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
- Publication number 20230094180
- Publication date Mar 30, 2023
- Applied Materials, Inc.
- Shaunak Mukherjee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
- Publication number 20210272800
- Publication date Sep 2, 2021
- Applied Materials, Inc.
- Shaunak Mukherjee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low-K Dielectric Films
- Publication number 20210050212
- Publication date Feb 18, 2021
- Applied Materials, Inc.
- William J. Durand
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low-K Dielectric With Self-Forming Barrier Layer
- Publication number 20200388532
- Publication date Dec 10, 2020
- Applied Materials, Inc.
- Yi Ding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH ASPECT RATIO DEPOSITION
- Publication number 20200216959
- Publication date Jul 9, 2020
- Applied Materials, Inc.
- Shaunak MUKHERJEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NON-UV HIGH HARDNESS LOW K FILM DEPOSITION
- Publication number 20200075321
- Publication date Mar 5, 2020
- Applied Materials, Inc.
- Shaunak MUKHERJEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SIBN FILM FOR CONFORMAL HERMETIC DIELECTRIC ENCAPSULATION WITHOUT D...
- Publication number 20190326110
- Publication date Oct 24, 2019
- Applied Materials, Inc.
- Milind GADRE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADICAL ASSISTED CURE OF DIELECTRIC FILMS
- Publication number 20190214228
- Publication date Jul 11, 2019
- Applied Materials, Inc.
- Yihong CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH DEPOSITION RATE AND HIGH QUALITY NITRIDE
- Publication number 20180233356
- Publication date Aug 16, 2018
- Applied Materials, Inc.
- Xinhai HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVELY LATERAL GROWTH OF SILICON OXIDE THIN FILM
- Publication number 20170323777
- Publication date Nov 9, 2017
- Applied Materials, Inc.
- Yihong CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVELY LATERAL GROWTH OF SILICON OXIDE THIN FILM
- Publication number 20170125239
- Publication date May 4, 2017
- Applied Materials, Inc.
- Yihong CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMP SINGLE PRECURSOR ARC HARD MASK FOR MULTILAYER PATTERNING A...
- Publication number 20170125241
- Publication date May 4, 2017
- Applied Materials, Inc.
- Shaunak MUKHERJEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVELY LATERAL GROWTH OF SILICON OXIDE THIN FILM
- Publication number 20160233084
- Publication date Aug 11, 2016
- Applied Materials, Inc.
- Yihong CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADICAL ASSISTED CURE OF DIELECTRIC FILMS
- Publication number 20160138161
- Publication date May 19, 2016
- Applied Materials, Inc.
- Yihong CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED PRE-CLEAN AND DEPOSITION OF LOW-DAMAGE LAYERS
- Publication number 20160017487
- Publication date Jan 21, 2016
- Applied Materials, Inc.
- Yihong CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED AND RADICAL-BASED CVD OF POROUS CARBON-DOPED OXIDE...
- Publication number 20160017495
- Publication date Jan 21, 2016
- Applied Materials, Inc.
- Yihong CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENABLING RADICAL-BASED DEPOSITION OF DIELECTRIC FILMS
- Publication number 20150167160
- Publication date Jun 18, 2015
- Applied Materials, Inc.
- Yihong CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shaunak MUKHERJEE

Person

Patents Grantslast 30 patents

Systems and methods for depositing low-k dielectric films

Systems and methods for depositing low-k dielectric films

Low-k dielectric films

Low-k dielectric with self-forming barrier layer

SiBN film for conformal hermetic dielectric encapsulation without d...

High deposition rate and high quality nitride

Selectively lateral growth of silicon oxide thin film

Selectively lateral growth of silicon oxide thin film

Selectively lateral growth of silicon oxide thin film

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS

SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS

Low-K Dielectric Films

Low-K Dielectric With Self-Forming Barrier Layer

HIGH ASPECT RATIO DEPOSITION

NON-UV HIGH HARDNESS LOW K FILM DEPOSITION

SIBN FILM FOR CONFORMAL HERMETIC DIELECTRIC ENCAPSULATION WITHOUT D...

RADICAL ASSISTED CURE OF DIELECTRIC FILMS

HIGH DEPOSITION RATE AND HIGH QUALITY NITRIDE

SELECTIVELY LATERAL GROWTH OF SILICON OXIDE THIN FILM

SELECTIVELY LATERAL GROWTH OF SILICON OXIDE THIN FILM

LOW TEMP SINGLE PRECURSOR ARC HARD MASK FOR MULTILAYER PATTERNING A...

SELECTIVELY LATERAL GROWTH OF SILICON OXIDE THIN FILM

RADICAL ASSISTED CURE OF DIELECTRIC FILMS

INTEGRATED PRE-CLEAN AND DEPOSITION OF LOW-DAMAGE LAYERS

PLASMA-ENHANCED AND RADICAL-BASED CVD OF POROUS CARBON-DOPED OXIDE...

ENABLING RADICAL-BASED DEPOSITION OF DIELECTRIC FILMS