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Sheldon Templeton
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer position correction with a dual, side-by-side wafer transfer...
Patent number
9,002,514
Issue date
Apr 7, 2015
Novellus Systems, Inc.
Damon Genetti
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Closed loop temperature heat up and control utilizing wafer-to-heat...
Patent number
8,920,162
Issue date
Dec 30, 2014
Novellus Systems, Inc.
Michael Nordin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Loadlock designs and methods for using same
Patent number
8,491,248
Issue date
Jul 23, 2013
Novellus Systems, Inc.
Chris Gage
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Closed loop temperature heat up and control utilizing wafer-to-heat...
Patent number
8,052,419
Issue date
Nov 8, 2011
Novellus Systems, Inc.
Michael Nordin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Loadlock designs and methods for using same
Patent number
8,033,769
Issue date
Oct 11, 2011
Novellus Systems, Inc.
Chris Gage
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
WAFER POSITION CORRECTION WITH A DUAL, SIDE-BY-SIDE WAFER TRANSFER...
Publication number
20150249028
Publication date
Sep 3, 2015
Novellus Systems, Inc.
Damon Genetti
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOADLOCK DESIGNS AND METHODS FOR USING SAME
Publication number
20120003063
Publication date
Jan 5, 2012
Chris Gage
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer position correction with a dual, side-by-side wafer transfer...
Publication number
20090142163
Publication date
Jun 4, 2009
Novellus System, Inc.
Damon Genetti
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Loadlock designs and methods for using same
Publication number
20090142167
Publication date
Jun 4, 2009
Novellus Systems, Inc.
Chris Gage
H01 - BASIC ELECTRIC ELEMENTS