Shen Peng

Person

Dublin, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system including coil with RF powered faraday...
- Patent number 12,087,557
- Issue date Sep 10, 2024
- Lam Research Corporation
- Shen Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Articulated direct-mount inductor and associated systems and methods
- Patent number 10,923,322
- Issue date Feb 16, 2021
- Lam Research Corporation
- Oscar Lopez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductive current sensor on printed circuit board
- Patent number 10,586,688
- Issue date Mar 10, 2020
- Lam Research Corporation
- Andras Kuthi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR USING A TRANSFORMER TO ACHIEVE UNIFORMITY I...
- Publication number 20230009651
- Publication date Jan 12, 2023
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVELY COUPLED PLASMA CHAMBER HEATER FOR CONTROLLING DIELECTRI...
- Publication number 20210305017
- Publication date Sep 30, 2021
- LAM RESEARCH CORPORATION
- Gordon Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM INCLUDING COIL WITH RF POWERED FARADAY...
- Publication number 20200411297
- Publication date Dec 31, 2020
- LAM RESEARCH CORPORATION
- Shen Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COIL AND WINDOW FOR PLASMA PROCESSING SYSTEM
- Publication number 20200234920
- Publication date Jul 23, 2020
- LAM RESEARCH CORPORATION
- Shen PENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Articulated Direct-Mount Inductor and Associated Systems and Methods
- Publication number 20180366301
- Publication date Dec 20, 2018
- LAM RESEARCH CORPORATION
- Oscar Lopez
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Inductive Current Sensor on Printed Circuit Board
- Publication number 20180217185
- Publication date Aug 2, 2018
- LAM RESEARCH CORPORATION
- Andras Kuthi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR RF POWER RATIO SWITCHING FOR ITERATIVE TRAN...
- Publication number 20180047543
- Publication date Feb 15, 2018
- LAM RESEARCH CORPORATION
- David Setton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM INCLUDING COIL WITH RF POWERED FARADAY...
- Publication number 20170278680
- Publication date Sep 28, 2017
- LAM RESEARCH CORPORATION
- Shen Peng
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Substrate processing system including coil with RF powered faraday...

Articulated direct-mount inductor and associated systems and methods

Inductive current sensor on printed circuit board

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR USING A TRANSFORMER TO ACHIEVE UNIFORMITY I...

INDUCTIVELY COUPLED PLASMA CHAMBER HEATER FOR CONTROLLING DIELECTRI...

SUBSTRATE PROCESSING SYSTEM INCLUDING COIL WITH RF POWERED FARADAY...

COIL AND WINDOW FOR PLASMA PROCESSING SYSTEM

Articulated Direct-Mount Inductor and Associated Systems and Methods

Inductive Current Sensor on Printed Circuit Board

SYSTEMS AND METHODS FOR RF POWER RATIO SWITCHING FOR ITERATIVE TRAN...

SUBSTRATE PROCESSING SYSTEM INCLUDING COIL WITH RF POWERED FARADAY...