Shena Jia

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for cleaning substrates using high temperature...
- Patent number 12,186,684
- Issue date Jan 7, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Fuping Chen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method and apparatus for cleaning substrates using high temperature...
- Patent number 11,925,881
- Issue date Mar 12, 2024
- ACM Research (Shanghai) Inc.
- Fuping Chen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for cleaning semiconductor substrates
- Patent number 11,498,100
- Issue date Nov 15, 2022
- ACM Research (Shanghai) Inc.
- Hui Wang
- B08 - CLEANING
Information Patent Grant
Method and apparatus for cleaning semiconductor wafer
- Patent number 11,462,423
- Issue date Oct 4, 2022
- ACM Research (Shanghai) Inc.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for cleaning substrates using high temperature...
- Patent number 11,000,782
- Issue date May 11, 2021
- ACM Research (Shanghai) Inc.
- Fuping Chen
- B08 - CLEANING
Information Patent Grant
Fall-proof apparatus for cleaning semiconductor devices and a chamb...
- Patent number 10,770,315
- Issue date Sep 8, 2020
- ACM Research (Shanghai) Inc.
- Zhenming Chu
- B08 - CLEANING
Information Patent Grant
Method and apparatus for cleaning semiconductor wafer
- Patent number 10,297,472
- Issue date May 21, 2019
- ACM Research (Shanghai) Inc.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WAFER CLEANING APPARATUS
- Publication number 20250018443
- Publication date Jan 16, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Xideng He
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20250001465
- Publication date Jan 2, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- B08 - CLEANING
Information Patent Application
THIN FILM DEPOSITION DEVICE, THIN FILM DEPOSITION METHOD AND THIN F...
- Publication number 20240368766
- Publication date Nov 7, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DRYING APPARATUS AND METHOD BASED ON SUPERCRITICAL FLUID
- Publication number 20240363370
- Publication date Oct 31, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- B08 - CLEANING
Information Patent Application
FLIPPING APPARATUS
- Publication number 20240347361
- Publication date Oct 17, 2024
- ACM RESEARCH (SHANGHAI), INC.
- He Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVIATION MEASUREMENT DEVICE
- Publication number 20240282644
- Publication date Aug 22, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20240266192
- Publication date Aug 8, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CLEANING SUBSTRATES USING HIGH TEMPERATURE...
- Publication number 20240207760
- Publication date Jun 27, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Fuping Chen
- B08 - CLEANING
Information Patent Application
SUBSTRATE SUPPORTING APPARATUS
- Publication number 20240105496
- Publication date Mar 28, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR REMOVING PARTICLES OR PHOTORESIST ON SUBST...
- Publication number 20230143401
- Publication date May 11, 2023
- ACM RESEARCH (SHANGHAI), INC.
- Xiaoyan Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CLEANING SUBSTRATES USING HIGH TEMPERATURE...
- Publication number 20210236961
- Publication date Aug 5, 2021
- ACM Research (Shanghai) Inc.
- Fuping Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR CLEANING SEMICONDUCTOR SUBSTRATES
- Publication number 20210138513
- Publication date May 13, 2021
- ACM Research (Shanghai) Inc.
- Hui Wang
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFER
- Publication number 20190273003
- Publication date Sep 5, 2019
- ACM Research (Shanghai) Inc.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CLEANING SUBSTRATES USING HIGH TEMPERATURE...
- Publication number 20180353876
- Publication date Dec 13, 2018
- ACM Research (Shanghai) Inc.
- Fuping Chen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Hybrid substrate processing system for dry and wet process and subs...
- Publication number 20180308729
- Publication date Oct 25, 2018
- ACN CO., LTD.
- Dai Kyu CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A FALL-PROOF APPARATUS FOR CLEANING SEMICONDUCTOR DEVICES AND A CHA...
- Publication number 20180033654
- Publication date Feb 1, 2018
- ACM Research (Shanghai) Inc.
- Zhenming Chu
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFER
- Publication number 20150332940
- Publication date Nov 19, 2015
- ACM Reasearch (Shanghai) Inc.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Method and apparatus for cleaning substrates using high temperature...

Method and apparatus for cleaning substrates using high temperature...

Apparatus for cleaning semiconductor substrates

Method and apparatus for cleaning semiconductor wafer

Method and apparatus for cleaning substrates using high temperature...

Fall-proof apparatus for cleaning semiconductor devices and a chamb...

Method and apparatus for cleaning semiconductor wafer

Patents Applicationslast 30 patents

WAFER CLEANING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD

THIN FILM DEPOSITION DEVICE, THIN FILM DEPOSITION METHOD AND THIN F...

DRYING APPARATUS AND METHOD BASED ON SUPERCRITICAL FLUID

FLIPPING APPARATUS

DEVIATION MEASUREMENT DEVICE

SUBSTRATE TREATMENT APPARATUS

METHOD AND APPARATUS FOR CLEANING SUBSTRATES USING HIGH TEMPERATURE...

SUBSTRATE SUPPORTING APPARATUS

METHOD AND APPARATUS FOR REMOVING PARTICLES OR PHOTORESIST ON SUBST...

METHOD AND APPARATUS FOR CLEANING SUBSTRATES USING HIGH TEMPERATURE...

APPARATUS FOR CLEANING SEMICONDUCTOR SUBSTRATES

METHOD AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFER

METHOD AND APPARATUS FOR CLEANING SUBSTRATES USING HIGH TEMPERATURE...

Hybrid substrate processing system for dry and wet process and subs...

A FALL-PROOF APPARATUS FOR CLEANING SEMICONDUCTOR DEVICES AND A CHA...

METHOD AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFER