Sheng-Huan Liu

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KweiShen, TW

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Patents Grantslast 30 patents

Information Patent Grant
CMP polishing pad having edge exclusion region of offset concentric...
- Patent number 9,409,276
- Issue date Aug 9, 2016
- Cabot Microelectronics Corporation
- Ching-Ming Tsai
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
GROOVED CMP POLISHING PAD
- Publication number 20110014858
- Publication date Jan 20, 2011
- Cabot Microelectronics Corporation
- Ching-Ming TSAI
- B24 - GRINDING POLISHING