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Sheng-Huan Liu
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KweiShen, TW
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last 30 patents
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Patent Grant
CMP polishing pad having edge exclusion region of offset concentric...
Patent number
9,409,276
Issue date
Aug 9, 2016
Cabot Microelectronics Corporation
Ching-Ming Tsai
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
GROOVED CMP POLISHING PAD
Publication number
20110014858
Publication date
Jan 20, 2011
Cabot Microelectronics Corporation
Ching-Ming TSAI
B24 - GRINDING POLISHING