Sheng-Hung Tu

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Danbury, CT, US

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Patents Grantslast 30 patents

Information Patent Grant
Post-etch residue removal for advanced node beol processing
- Patent number 10,790,187
- Issue date Sep 29, 2020
- Entegris, Inc.
- Emanuel I. Cooper
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Compositions and methods for selectively etching titanium nitride
- Patent number 9,546,321
- Issue date Jan 17, 2017
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
POST-ETCH RESIDUE REMOVAL FOR ADVANCED NODE BEOL PROCESSING
- Publication number 20180204764
- Publication date Jul 19, 2018
- Entegris, Inc.
- Emanuel I. Cooper
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE
- Publication number 20150027978
- Publication date Jan 29, 2015
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...