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SEMICONDUCTOR DEVICE AND METHOD
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DC Bias in Plasma Process
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Publication date Nov 30, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Semiconductor Device and Method
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Publication date Oct 26, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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H01 - BASIC ELECTRIC ELEMENTS
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DC Bias in Plasma Process
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Semiconductor Device and Method
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Taiwan Semiconductor Manufacturing Co., Ltd.
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor Device and Method
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Taiwan Semiconductor Manufacturing Co., Ltd.
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor Device and Method
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Publication number 20210082768
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Publication date Mar 18, 2021
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Taiwan Semiconductor Manufacturing Co., Ltd.
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H01 - BASIC ELECTRIC ELEMENTS
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