Sheng-Ting Shu

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Hsinchu City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Slide-type cylinder coupling for CMP load cup
- Patent number 6,968,772
- Issue date Nov 29, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jing-Long Lin
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Slide-type cylinder coupling for CMP load cup
- Publication number 20050047858
- Publication date Mar 3, 2005
- Taiwan Semiconductor Manufacturing Co. Ltd.
- Jing-Long Lin
- B24 - GRINDING POLISHING