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Sheng-Wei Wu
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Zhubei City, TW
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Patents Grants
last 30 patents
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Patent Grant
Vertical furnace for improving wafer uniformity
Patent number
9,605,345
Issue date
Mar 28, 2017
Taiwan Semiconductor Manufacturing Co., Ltd
Eddy Lay
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Vertical Furnace for Improving Wafer Uniformity
Publication number
20150053136
Publication date
Feb 26, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Eddy Lay
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...