Shengnan Yu

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum processing apparatus
- Patent number 12,014,908
- Issue date Jun 18, 2024
- HITACHI HIGH-TECH CORPORATION
- Shengnan Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,776,792
- Issue date Oct 3, 2023
- HITACHI HIGH-TECH CORPORATION
- Shunsuke Tashiro
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240290581
- Publication date Aug 29, 2024
- Hitachi High-Tech Corporation
- Shengnan Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240222096
- Publication date Jul 4, 2024
- Hitachi High-Tech Corporation
- Shunsuke TASHIRO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220115212
- Publication date Apr 14, 2022
- Hitachi High-Tech Corporation
- Shunsuke Tashiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20220115217
- Publication date Apr 14, 2022
- Hitachi High-Tech Corporation
- Shengnan Yu
- H01 - BASIC ELECTRIC ELEMENTS