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South Hamilton, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
System and method for improved beam current from an ion source
Patent number
11,232,925
Issue date
Jan 25, 2022
Applied Materials, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for improved beam current from an ion source
Patent number
11,120,966
Issue date
Sep 14, 2021
Applied Materials, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High-current ion implanter and method for controlling ion beam usin...
Patent number
11,011,343
Issue date
May 18, 2021
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for controlling ion beam using electrostatic f...
Patent number
10,937,624
Issue date
Mar 2, 2021
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic filter and ion implanter having asymmetric electrosta...
Patent number
10,886,098
Issue date
Jan 5, 2021
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electostatic filter and method for controlling ion beam properties...
Patent number
10,804,068
Issue date
Oct 13, 2020
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electostatic filter and method for controlling ion beam using elect...
Patent number
10,790,116
Issue date
Sep 29, 2020
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conductive beam optics for reducing particles in ion implanter
Patent number
10,714,301
Issue date
Jul 14, 2020
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for controlling ion beam properties using elec...
Patent number
10,665,415
Issue date
May 26, 2020
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conductive beam optic containing internal heating element
Patent number
10,504,682
Issue date
Dec 10, 2019
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for controlling ion beam properties using ener...
Patent number
10,468,224
Issue date
Nov 5, 2019
Varian Semiconductor Equipment Associates, Inc.
Svetlana Radovanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for improved ion beam current
Patent number
10,074,514
Issue date
Sep 11, 2018
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Source housing assembly for controlling ion beam extraction stabili...
Patent number
9,934,928
Issue date
Apr 3, 2018
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Controlling an ion beam in a wide beam current operation range
Patent number
9,679,745
Issue date
Jun 13, 2017
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cold stripper for high energy ion implanter with tandem accelerator
Patent number
9,520,204
Issue date
Dec 13, 2016
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Method and apparatus for generating high current negative hydrogen...
Patent number
9,437,341
Issue date
Sep 6, 2016
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Apparatus and method to control ion beam current
Patent number
9,396,903
Issue date
Jul 19, 2016
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bias electrodes for tandem accelerator
Patent number
9,281,165
Issue date
Mar 8, 2016
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Moveable current sensor for increasing ion beam utilization during...
Patent number
9,263,231
Issue date
Feb 16, 2016
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for treating ion beam
Patent number
9,165,744
Issue date
Oct 20, 2015
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Platen control
Patent number
9,012,337
Issue date
Apr 21, 2015
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and techniques for controlling ion implantation uniformity
Patent number
9,006,692
Issue date
Apr 14, 2015
Varian Semiconductor Equipment Associates, Inc.
Stanislav S. Todorov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and techniques for controlling ion implantation uniformity
Patent number
8,853,653
Issue date
Oct 7, 2014
Varian Semiconductor Equipment Associates, Inc.
Stanislav S. Todorov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Hybrid electrostatic lens for improved beam transmission
Patent number
8,664,619
Issue date
Mar 4, 2014
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam tuning
Patent number
8,330,125
Issue date
Dec 11, 2012
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High voltage insulator for preventing instability in an ion implant...
Patent number
7,622,724
Issue date
Nov 24, 2009
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method, system, and apparatus for improving doping uniformity in hi...
Patent number
7,462,844
Issue date
Dec 9, 2008
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron confinement inside magnet of ion implanter
Patent number
7,459,692
Issue date
Dec 2, 2008
Varian Semiconductor Equipment Associates, Inc.
Anthony Renau
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam implant current, spot width and position tuning
Patent number
7,442,944
Issue date
Oct 28, 2008
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Technique for tuning an ion implanter system
Patent number
7,397,047
Issue date
Jul 8, 2008
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND METHOD FOR CONTROLLING ION BEAM USING ELECTOSTATIC FI...
Publication number
20210159043
Publication date
May 27, 2021
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System And Method For Improved Beam Current From An Ion Source
Publication number
20210066019
Publication date
Mar 4, 2021
Applied Materials, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System And Method For Improved Beam Current From An Ion Source
Publication number
20210066017
Publication date
Mar 4, 2021
Applied Materials, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH-CURRENT ION IMPLANTER AND METHOD FOR CONTROLLING ION BEAM USIN...
Publication number
20210020399
Publication date
Jan 21, 2021
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTOSTATIC FILTER AND METHOD FOR CONTROLLING ION BEAM USING ELECT...
Publication number
20200161089
Publication date
May 21, 2020
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTOSTATIC FILTER AND METHOD FOR CONTROLLING ION BEAM PROPERTIES...
Publication number
20200161076
Publication date
May 21, 2020
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC FILTER AND ION IMPLANTER HAVING ASYMMETRIC ELECTROSTA...
Publication number
20200161077
Publication date
May 21, 2020
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR CONTROLLING ION BEAM USING ELECTOSTATIC FI...
Publication number
20200161078
Publication date
May 21, 2020
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR CONTROLLING ION BEAM PROPERTIES USING ELEC...
Publication number
20200144017
Publication date
May 7, 2020
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONDUCTIVE BEAM OPTIC CONTAINING INTERNAL HEATING ELEMENT
Publication number
20190259560
Publication date
Aug 22, 2019
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR CONTROLLING ION BEAM PROPERTIES USING ENER...
Publication number
20190198283
Publication date
Jun 27, 2019
Varian Semiconductor Equipment Associates, Inc.
Svetlana Radovanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROLLING AN ION BEAM IN A WIDE BEAM CURRENT OPERATION RANGE
Publication number
20170110286
Publication date
Apr 20, 2017
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOURCE HOUSING ASSEMBLY FOR CONTROLLING ION BEAM EXTRACTION STABILI...
Publication number
20160336138
Publication date
Nov 17, 2016
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD TO CONTROL ION BEAM CURRENT
Publication number
20160233048
Publication date
Aug 11, 2016
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BIAS ELECTRODES FOR TANDEM ACCELERATOR
Publication number
20160064186
Publication date
Mar 3, 2016
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR THREE DIMENSIONAL ION IMPLANTATION
Publication number
20150228445
Publication date
Aug 13, 2015
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COLD STRIPPER FOR HIGH ENERGY ION IMPLANTER WITH TANDEM ACCELERATOR
Publication number
20150187450
Publication date
Jul 2, 2015
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
MOVEABLE CURRENT SENSOR FOR INCREASING ION BEAM UTILIZATION DURING...
Publication number
20150104885
Publication date
Apr 16, 2015
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND TECHNIQUES FOR CONTROLLING ION IMPLANTATION UNIFORMITY
Publication number
20140326179
Publication date
Nov 6, 2014
Varian Semiconductor Equipment Associates, Inc.
Stanislav S. Todorov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR TREATING ION BEAM
Publication number
20140110596
Publication date
Apr 24, 2014
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYBRID ELECTROSTATIC LENS FOR IMPROVED BEAM TRANSMISSION
Publication number
20130256526
Publication date
Oct 3, 2013
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus for Generating High Current Negative Hydrogen...
Publication number
20130255577
Publication date
Oct 3, 2013
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
HYBRID ELECTROSTATIC LENS FOR IMPROVED BEAM TRANSMISSION
Publication number
20130256527
Publication date
Oct 3, 2013
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLATEN CONTROL
Publication number
20120088035
Publication date
Apr 12, 2012
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM TUNING
Publication number
20120068081
Publication date
Mar 22, 2012
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCISTES, INC.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH VOLTAGE INSULATOR FOR PREVENTING INSTABILITY IN AN ION IMPLANT...
Publication number
20080315114
Publication date
Dec 25, 2008
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method, system, and apparatus for improving doping uniformity in hi...
Publication number
20070085037
Publication date
Apr 19, 2007
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Technique for uniformity tuning in an ion implanter system
Publication number
20060284114
Publication date
Dec 21, 2006
Varian Semiconductor Equipment Associates, Inc.
Joseph C. Olson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Technique for uniformity tuning in an ion implanter system
Publication number
20060266957
Publication date
Nov 30, 2006
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Technique for tuning an ion implanter system
Publication number
20060249696
Publication date
Nov 9, 2006
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS