Sheri A. Durgin

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Woburn, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Electrode, accelerator column and ion implantation apparatus includ...
- Patent number 9,807,864
- Issue date Oct 31, 2017
- Varian Semiconductor Equipment Associates Inc.
- Christopher Lupoli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for transferring articles between vacuum and non-...
- Patent number 9,558,975
- Issue date Jan 31, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Sheri A. Durgin
- H01 - BASIC ELECTRIC ELEMENTS