Sherman K. Poultney

Person

Wilton, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for wavefront measurements of an optical system
- Patent number 7,768,653
- Issue date Aug 3, 2010
- ASML Hodling N.V.
- Azat Latypov
- G01 - MEASURING TESTING
Information Patent Grant
Methods for measuring a wavefront of an optical system
- Patent number 7,602,503
- Issue date Oct 13, 2009
- ASML Holdings N.V.
- Sherman K. Poultney
- G01 - MEASURING TESTING
Information Patent Grant
Grating for EUV lithographic system aberration measurement
- Patent number 7,595,931
- Issue date Sep 29, 2009
- ASML Holding N.V.
- Sherman K. Poultney
- G01 - MEASURING TESTING
Information Patent Grant
System and method for calibrating a spatial light modulator
- Patent number 7,580,559
- Issue date Aug 25, 2009
- ASML Holding N.V.
- Azat M. Latypov
- G02 - OPTICS
Information Patent Grant
Method and system for a maskless lithography rasterization techniqu...
- Patent number 7,469,058
- Issue date Dec 23, 2008
- ASML Holding N.V.
- Azat Latypov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Transmission shear grating in checkerboard configuration for EUV wa...
- Patent number 7,268,891
- Issue date Sep 11, 2007
- ASML Holding N.V.
- Sherman K. Poultney
- G01 - MEASURING TESTING
Information Patent Grant
System and method for calibrating a spatial light modulator array u...
- Patent number 7,158,238
- Issue date Jan 2, 2007
- ASML Holding N.V.
- Azat M. Latypov
- G01 - MEASURING TESTING
Information Patent Grant
Grating patch arrangement, lithographic apparatus, method of testin...
- Patent number 7,113,255
- Issue date Sep 26, 2006
- ASML Holding N.V.
- Sherman Poultney
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method to compensate for static and dynamic misalignment...
- Patent number 7,102,733
- Issue date Sep 5, 2006
- ASML Holding N.V.
- Azat M. Latypov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for calibrating a spatial light modulator array u...
- Patent number 6,965,436
- Issue date Nov 15, 2005
- ASML Holding N.V.
- Azat M. Latypov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Tailored reflecting diffractor for EUV lithographic system aberrati...
- Patent number 6,867,846
- Issue date Mar 15, 2005
- ASML Holding N.V.
- Sherman K. Poultney
- G01 - MEASURING TESTING
Information Patent Grant
System and method for calibrating a spatial light modulator array u...
- Patent number 6,847,461
- Issue date Jan 25, 2005
- ASML Holding N.V.
- Azat M. Latypov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for measuring, thinning and flattening silicon structures
- Patent number 5,563,709
- Issue date Oct 8, 1996
- Integrated Process Equipment Corp.
- Sherman K. Poultney
- G01 - MEASURING TESTING
Information Patent Grant
Very wide spectral coverage grating spectrometer
- Patent number 4,729,658
- Issue date Mar 8, 1988
- The Perkin-Elmer Corporation
- Sherman K. Poultney
- G01 - MEASURING TESTING
Information Patent Grant
Off-chip time-delayed integration area array Fraunhofer line discri...
- Patent number 4,724,326
- Issue date Feb 9, 1988
- The Perkin-Elmer Corporation
- Sherman K. Poultney
- G01 - MEASURING TESTING
Information Patent Grant
Fraunhofer line discriminator
- Patent number 4,433,245
- Issue date Feb 21, 1984
- The Perkin-Elmer Corporation
- Sherman K. Poultney
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Method and system for wavefront measurements of an optical system
- Publication number 20090021748
- Publication date Jan 22, 2009
- ASML Holding N.V.
- Azat M. Latypov
- G01 - MEASURING TESTING
Information Patent Application
Transmission shear grating in checkerboard configuration for EUV wa...
- Publication number 20070153295
- Publication date Jul 5, 2007
- ASML Holding N.V.
- Sherman K. Poultney
- G02 - OPTICS
Information Patent Application
Method and system for a maskless lithography rasterization techniqu...
- Publication number 20060209314
- Publication date Sep 21, 2006
- ASML Holding N.V.
- Azat Latypov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method to compensate for static and dynamic misalignment...
- Publication number 20060033902
- Publication date Feb 16, 2006
- ASML Holding, N.V.
- Azat M. Latypov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Spatial light modulator as source module for DUV wavefront sensor
- Publication number 20060001890
- Publication date Jan 5, 2006
- ASML Holding N.V.
- Sherman K. Poultney
- G01 - MEASURING TESTING
Information Patent Application
Shearing interferometer with dynamic pupil fill
- Publication number 20050259269
- Publication date Nov 24, 2005
- ASML Holding N.V.
- Azat M. Latypov
- G01 - MEASURING TESTING
Information Patent Application
System and method for calibrating a spatial light modulator array u...
- Publication number 20050225859
- Publication date Oct 13, 2005
- ASML Holding N.V.
- Azat M. Latypov
- G02 - OPTICS
Information Patent Application
System and method for calibrating a spatial light modulator
- Publication number 20050168790
- Publication date Aug 4, 2005
- ASML Holding N.V.
- Azat M. Latypov
- G02 - OPTICS
Information Patent Application
SYSTEM AND METHOD FOR CALIBRATING A SPATIAL LIGHT MODULATOR ARRAY U...
- Publication number 20050168791
- Publication date Aug 4, 2005
- ASML Holding N.V.
- Azat M. Latypov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Grating for EUV lithographic system aberration measurement
- Publication number 20050146700
- Publication date Jul 7, 2005
- ASML Holding N.V.
- Sherman K. Poultney
- G02 - OPTICS
Information Patent Application
Grating patch arrangement, lithographic apparatus, method of testin...
- Publication number 20050134824
- Publication date Jun 23, 2005
- ASML NETHERLANDS B.V.
- Sherman Poultney
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Transmission shear grating in checkerboard configuration for EUV wa...
- Publication number 20040169866
- Publication date Sep 2, 2004
- ASML Holding, N. V.
- Sherman K. Poultney
- G02 - OPTICS
Information Patent Application
Tailored reflecting diffractor for EUV lithographic system aberrati...
- Publication number 20040145714
- Publication date Jul 29, 2004
- ASML Holding, N. V.
- Sherman K. Poultney
- G02 - OPTICS

Sherman K. Poultney

Person

Patents Grantslast 30 patents

Method and system for wavefront measurements of an optical system

Methods for measuring a wavefront of an optical system

Grating for EUV lithographic system aberration measurement

System and method for calibrating a spatial light modulator

Method and system for a maskless lithography rasterization techniqu...

Transmission shear grating in checkerboard configuration for EUV wa...

System and method for calibrating a spatial light modulator array u...

Grating patch arrangement, lithographic apparatus, method of testin...

System and method to compensate for static and dynamic misalignment...

System and method for calibrating a spatial light modulator array u...

Tailored reflecting diffractor for EUV lithographic system aberrati...

System and method for calibrating a spatial light modulator array u...

Apparatus for measuring, thinning and flattening silicon structures

Very wide spectral coverage grating spectrometer

Off-chip time-delayed integration area array Fraunhofer line discri...

Fraunhofer line discriminator

Patents Applicationslast 30 patents

Method and system for wavefront measurements of an optical system

Transmission shear grating in checkerboard configuration for EUV wa...

Method and system for a maskless lithography rasterization techniqu...

System and method to compensate for static and dynamic misalignment...

Spatial light modulator as source module for DUV wavefront sensor

Shearing interferometer with dynamic pupil fill

System and method for calibrating a spatial light modulator array u...

System and method for calibrating a spatial light modulator

SYSTEM AND METHOD FOR CALIBRATING A SPATIAL LIGHT MODULATOR ARRAY U...

Grating for EUV lithographic system aberration measurement

Grating patch arrangement, lithographic apparatus, method of testin...

Transmission shear grating in checkerboard configuration for EUV wa...

Tailored reflecting diffractor for EUV lithographic system aberrati...