Shi-kay Yao

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El Monte, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Chevron correction and autofocus optics for laser scanner
- Patent number 6,107,622
- Issue date Aug 22, 2000
- Etec Systems, Inc.
- Shi-Kay Yao
- G02 - OPTICS
Information Patent Grant
Two piece mirror arrangement for interferometrically controlled stage
- Patent number 6,057,921
- Issue date May 2, 2000
- Etec Systems, Inc.
- Shi-kay Yao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY