SHI-LU ZHAN

Person

  • Beijing, CN

Patents Grantslast 30 patents

  • Information Patent Grant

    Sputtering target

    • Patent number 10,480,061
    • Issue date Nov 19, 2019
    • Tsinghua University
    • Da-Ming Zhuang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering target and method for making the same

    • Patent number 10,077,496
    • Issue date Sep 18, 2018
    • Tsinghua University
    • Da-Ming Zhuang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SPUTTERING TARGET

    • Publication number 20180327896
    • Publication date Nov 15, 2018
    • TSINGHUA UNIVERSITY
    • DA-MING ZHUANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING TARGET AND METHOD FOR MAKING THE SAME

    • Publication number 20160326633
    • Publication date Nov 10, 2016
    • TSINGHUA UNIVERSITY
    • DA-MING ZHUANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...