Shiaki Murai

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Defect inspection apparatus for phase shift mask
- Patent number 6,879,393
- Issue date Apr 12, 2005
- Dai Nippon Printing Co., Ltd.
- Yasuhiro Koizumi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Defect inspection apparatus for phase shift mask
- Publication number 20020036772
- Publication date Mar 28, 2002
- Yasuhiro Koizumi
- G01 - MEASURING TESTING