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Miaoli County, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Thermal chemical vapor deposition system and operating method thereof
Patent number
10,724,140
Issue date
Jul 28, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Yen-Chan Lo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thermal chemical vapor deposition system and operating method thereof
Patent number
10,161,041
Issue date
Dec 25, 2018
Taiwan Semiconductor Manufacturing Co., Ltd
Yen-Chan Lo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Thermal Chemical Vapor Deposition System and Operating Method Thereof
Publication number
20180334747
Publication date
Nov 22, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Yen-Chan Lo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
THERMAL CHEMICAL VAPOR DEPOSITION SYSTEM AND OPERATING METHOD THEREOF
Publication number
20170107619
Publication date
Apr 20, 2017
Taiwan Semiconductor Manufacturing Co., Ltd.
Yen-Chan LO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...