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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method, apparatus, and system for wafer grounding
- Patent number 12,051,562
- Issue date Jul 30, 2024
- ASML Netherlands B.V.
- Yixiang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Object table comprising an electrostatic clamp
- Patent number 12,028,000
- Issue date Jul 2, 2024
- ASML Netherlands B.V.
- Jan-Gerard Cornelis Van Der Toorn
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Object table comprising an electrostatic clamp
- Patent number 11,637,512
- Issue date Apr 25, 2023
- ASML Netherlands B.V.
- Jan-Gerard Cornelis Van Der Toorn
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
- Publication number 20240396476
- Publication date Nov 28, 2024
- ASML NETHERLANDS B.V.
- Jan-Gerard Cornelis VAN DER TOORN
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
METHOD, APPARATUS, AND SYSTEM FOR WAFER GROUNDING
- Publication number 20240371599
- Publication date Nov 7, 2024
- ASML Netheriands B. V.
- Yixiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
- Publication number 20230246568
- Publication date Aug 3, 2023
- ASML NETHERLANDS B.V.
- Jan-Gerard Cornelis VAN DER TOORN
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
METHOD, APPARATUS, AND SYSTEM FOR DYNAMICALLY CONTROLLING AN ELECTR...
- Publication number 20230178406
- Publication date Jun 8, 2023
- ASML NETHERLANDS B.V.
- Yixiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, APPARATUS, AND SYSTEM FOR WAFER GROUNDING
- Publication number 20220277926
- Publication date Sep 1, 2022
- ASML NETHERLANDS B.V.
- Yixiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
- Publication number 20210313908
- Publication date Oct 7, 2021
- ASML NETHERLANDS B.V.
- Jan-Gerard Cornelis VAN DER TOORN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shibing LIU

Person

Patents Grantslast 30 patents

Method, apparatus, and system for wafer grounding

Object table comprising an electrostatic clamp

Object table comprising an electrostatic clamp

Patents Applicationslast 30 patents

OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP

METHOD, APPARATUS, AND SYSTEM FOR WAFER GROUNDING

OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP

METHOD, APPARATUS, AND SYSTEM FOR DYNAMICALLY CONTROLLING AN ELECTR...

METHOD, APPARATUS, AND SYSTEM FOR WAFER GROUNDING

OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP