Shibu Gangadharan

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Aspect ratio adjustment of mask pattern using trimming to alter geo...
- Patent number 8,394,723
- Issue date Mar 12, 2013
- Lam Research Corporation
- Juan Valdivia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ pre-coating of plasma etch chamber for improved productivit...
- Patent number 7,767,584
- Issue date Aug 3, 2010
- Lam Research Corporation
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for hard mask CD trim
- Patent number 7,667,281
- Issue date Feb 23, 2010
- Lam Research Corporation
- C. Robert Koemtzopoulos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for hard mask CD trim
- Patent number 7,425,277
- Issue date Sep 16, 2008
- Lam Research Corporation
- C. Robert Koemtzopoulos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ pre-coating of plasma etch chamber for improved productivit...
- Patent number 7,204,913
- Issue date Apr 17, 2007
- Lam Research Corporation
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ASPECT RATIO ADJUSTMENT OF MASK PATTERN USING TRIMMING TO ALTER GEO...
- Publication number 20110163420
- Publication date Jul 7, 2011
- LAM RESEARCH CORPORATION
- Juan Valdivia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Hard Mask CD Trim
- Publication number 20070249177
- Publication date Oct 25, 2007
- LAM RESEARCH CORPORATION
- C. Robert Koemtzopoulos
- H01 - BASIC ELECTRIC ELEMENTS