Shicai Fang

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Shenyang, CN

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Patents Grantslast 30 patents

Information Patent Grant
Ceramic ring with a ladder structure
- Patent number 10,643,882
- Issue date May 5, 2020
- PIOTECH CO., LTD.
- Xuyen Pham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load lock chamber and the cluster tool system using the same
- Patent number 10,497,591
- Issue date Dec 3, 2019
- PIOTECH CO., LTD.
- Ren Zhou
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CERAMIC RING WITH A LADDER STRUCTURE
- Publication number 20180053682
- Publication date Feb 22, 2018
- PIOTECH CO., LTD.
- XUYEN PHAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD LOCK CHAMBER AND THE CLUSTER TOOL SYSTEM USING THE SAME
- Publication number 20170271187
- Publication date Sep 21, 2017
- PIOTECH CO., LTD.
- Ren ZHOU
- H01 - BASIC ELECTRIC ELEMENTS