Shifang Zhou

Person

Redmond, WA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Anodically bonded strain isolator
- Patent number 9,187,313
- Issue date Nov 17, 2015
- Honeywell International Inc.
- Mark Eskridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bidirectional, out-of-plane, comb drive accelerometer
- Patent number 8,418,555
- Issue date Apr 16, 2013
- Honeywell International Inc.
- Michael Foster
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for fabricating an out-of-plane MEMS structure
- Patent number 8,404,568
- Issue date Mar 26, 2013
- Honeywell International Inc.
- Michael Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mechanical isolation for MEMS devices
- Patent number 7,830,003
- Issue date Nov 9, 2010
- Honeywell International, Inc.
- Michael Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor with position-independent drive electrodes in multi-layer si...
- Patent number 7,690,254
- Issue date Apr 6, 2010
- Honeywell International Inc.
- Jorg Pilchowski
- G01 - MEASURING TESTING
Information Patent Grant
Three-dimensional microstructures having an embedded and mechanical...
- Patent number 7,649,432
- Issue date Jan 19, 2010
- Nuvotornics, LLC
- David W. Sherrer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Z offset MEMS devices and methods
- Patent number 7,487,678
- Issue date Feb 10, 2009
- Honeywell International Inc.
- Michael J. Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ANODICALLY BONDED STRAIN ISOLATOR
- Publication number 20130341735
- Publication date Dec 26, 2013
- Honeywell International Inc.
- Mark Eskridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BIDIRECTIONAL, OUT-OF-PLANE, COMB DRIVE ACCELEROMETER
- Publication number 20100326191
- Publication date Dec 30, 2010
- Honeywell International Inc.
- Michael Foster
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR FABRICATING AN OUT-OF-PLANE MEMS STRUCTURE
- Publication number 20090321008
- Publication date Dec 31, 2009
- Honeywell International Inc.
- Michael Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MECHANICAL ISOLATION FOR MEMS DEVICES
- Publication number 20090166827
- Publication date Jul 2, 2009
- Honeywell International, Inc.
- Michael Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR WITH POSITION-INDEPENDENT DRIVE ELECTRODES IN MULTI-LAYER SI...
- Publication number 20090025477
- Publication date Jan 29, 2009
- Honeywell International Inc.
- Jorg Pilchowski
- G01 - MEASURING TESTING
Information Patent Application
THICK ACTIVE LAYER FOR MEMS DEVICE USING WAFER DISSOLVE PROCESS
- Publication number 20090001499
- Publication date Jan 1, 2009
- Honeywell International Inc.
- Lianzhong Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Three-dimensional microstructures and methods of formation thereof
- Publication number 20080199656
- Publication date Aug 21, 2008
- Rohm and Haas Electronic Materials L.L.C.
- Christopher A. Nichols
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Three-dimensional microstructures and methods of formation thereof
- Publication number 20080191817
- Publication date Aug 14, 2008
- Rohm and Haas Electronic Materials L.L.C.
- David W. Sherrer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Z OFFSET MEMS DEVICES AND METHODS
- Publication number 20080142913
- Publication date Jun 19, 2008
- Honeywell International Inc.
- Michael J. Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Shifang Zhou

Person

Patents Grantslast 30 patents

Anodically bonded strain isolator

Bidirectional, out-of-plane, comb drive accelerometer

Systems and methods for fabricating an out-of-plane MEMS structure

Mechanical isolation for MEMS devices

Sensor with position-independent drive electrodes in multi-layer si...

Three-dimensional microstructures having an embedded and mechanical...

Z offset MEMS devices and methods

Patents Applicationslast 30 patents

ANODICALLY BONDED STRAIN ISOLATOR

BIDIRECTIONAL, OUT-OF-PLANE, COMB DRIVE ACCELEROMETER

SYSTEMS AND METHODS FOR FABRICATING AN OUT-OF-PLANE MEMS STRUCTURE

MECHANICAL ISOLATION FOR MEMS DEVICES

SENSOR WITH POSITION-INDEPENDENT DRIVE ELECTRODES IN MULTI-LAYER SI...

THICK ACTIVE LAYER FOR MEMS DEVICE USING WAFER DISSOLVE PROCESS

Three-dimensional microstructures and methods of formation thereof

Three-dimensional microstructures and methods of formation thereof

Z OFFSET MEMS DEVICES AND METHODS