SHIFENG HE

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for detecting overlay mark with bright and dar...
- Patent number 10,658,210
- Issue date May 19, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- Shifeng He
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
OVERLAY MEASUREMENT METHOD AND APPARATUS
- Publication number 20180122669
- Publication date May 3, 2018
- Semiconductor Manufacturing International (Shanghai) Corporation
- QIANG WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR DETECTING OVERLAY MARK WITH BRIGHT AND DAR...
- Publication number 20180122668
- Publication date May 3, 2018
- Semiconductor Manufacturing International (Shanghai) Corporation
- SHIFENG HE
- H01 - BASIC ELECTRIC ELEMENTS