Shigeaki Kato

Person

Miyagi-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method, system and program
- Patent number 8,475,623
- Issue date Jul 2, 2013
- Tokyo Electron Limited
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, system and program
- Patent number 8,257,601
- Issue date Sep 4, 2012
- Tokyo Electron Limited
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, focus ring, and susceptor
- Patent number 8,124,539
- Issue date Feb 28, 2012
- Tokyo Electron Limited
- Shosuke Endoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of maintaining and automatically inspecting processing appar...
- Patent number 7,555,406
- Issue date Jun 30, 2009
- Tokyo Electron Limited
- Hisato Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of self-diagnosing software for driving processing apparatus
- Patent number 7,386,423
- Issue date Jun 10, 2008
- Hisato Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of automatically resetting processing apparatus
- Patent number 6,954,716
- Issue date Oct 11, 2005
- Tokyo Electron Limited
- Hisato Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM
- Publication number 20120292290
- Publication date Nov 22, 2012
- TOKYO ELECTRON LIMITED
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM
- Publication number 20110171830
- Publication date Jul 14, 2011
- TOKYO ELECTRON LIMITED
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, FOCUS RING, AND SUSCEPTOR
- Publication number 20110000883
- Publication date Jan 6, 2011
- TOKYO ELECTRON LIMITED
- Shosuke Endoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method, system and program
- Publication number 20060090703
- Publication date May 4, 2006
- TOKYO ELECTRON LIMITED
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of maintaining and automatically inspecting processing appar...
- Publication number 20050090927
- Publication date Apr 28, 2005
- TOKYO ELECTRON LIMITED
- Hisato Tanaka
- G05 - CONTROLLING REGULATING
Information Patent Application
Methods of self-diagnosing software for driving processing apparatus
- Publication number 20050090926
- Publication date Apr 28, 2005
- TOKYO ELECTRON LIMITED
- Hisato Tanaka
- G05 - CONTROLLING REGULATING
Information Patent Application
Plasma processing apparatus, focus ring, and susceptor
- Publication number 20040261946
- Publication date Dec 30, 2004
- TOKYO ELECTRON LIMITED
- Shosuke Endoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for maintaining processor, method of automatically inspectin...
- Publication number 20030182084
- Publication date Sep 25, 2003
- Hisato Tanaka
- G05 - CONTROLLING REGULATING

Shigeaki Kato

Person

Patents Grantslast 30 patents

Substrate processing method, system and program

Substrate processing method, system and program

Plasma processing apparatus, focus ring, and susceptor

Method of maintaining and automatically inspecting processing appar...

Methods of self-diagnosing software for driving processing apparatus

Method of automatically resetting processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM

SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM

PLASMA PROCESSING APPARATUS, FOCUS RING, AND SUSCEPTOR

Substrate processing method, system and program

Method of maintaining and automatically inspecting processing appar...

Methods of self-diagnosing software for driving processing apparatus

Plasma processing apparatus, focus ring, and susceptor

Method for maintaining processor, method of automatically inspectin...