Shigehiro Goto

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Treating liquid vaporizing apparatus
- Patent number 10,651,056
- Issue date May 12, 2020
- SCREEN Holdings Co., Ltd.
- Atsushi Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240299971
- Publication date Sep 12, 2024
- SCREEN Holdings Co., Ltd.
- Masafumi SUZUKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240286168
- Publication date Aug 29, 2024
- SCREEN Holdings Co., Ltd.
- Masafumi SUZUKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...