Shigehiro GOTO

Person

Kyoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Thermal processing apparatus and thermal processing method
- Patent number 10,629,463
- Issue date Apr 21, 2020
- SCREEN Holdings Co., Ltd.
- Toru Momma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and treatment gas supplying nozzle
- Patent number 10,214,814
- Issue date Feb 26, 2019
- SCREEN Holdings Co., Ltd.
- Yasuhiro Fukumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,508,573
- Issue date Nov 29, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahito Kashiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heat treatment apparatus
- Patent number 8,608,885
- Issue date Dec 17, 2013
- Dainippon Screen Mfg. Co., Ltd.
- Shigehiro Goto
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate heat treatment apparatus
- Patent number 8,003,919
- Issue date Aug 23, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Shigehiro Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heat treatment apparatus
- Patent number 7,718,925
- Issue date May 18, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Shigehiro Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treating solution supply nozzle, a substrate treating apparatus hav...
- Patent number 7,628,862
- Issue date Dec 8, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Shigehiro Goto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate heat treatment apparatus
- Patent number 7,432,476
- Issue date Oct 7, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Akihiko Morita
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Treating solution supply nozzle, a substrate treating apparatus hav...
- Patent number 7,267,723
- Issue date Sep 11, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Shigehiro Goto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Chemical treating apparatus
- Patent number 6,827,782
- Issue date Dec 7, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Shigehiro Goto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating solution applying method and apparatus
- Patent number 6,440,218
- Issue date Aug 27, 2002
- Dainippon Screen Mfg. Co., Ltd.
- Masakazu Sanada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
THERMAL PROCESSING APPARATUS AND THERMAL PROCESSING METHOD
- Publication number 20180033660
- Publication date Feb 1, 2018
- SCREEN Holdings Co., Ltd.
- Toru MOMMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATING LIQUID VAPORIZING APPARATUS AND SUBSTRATE TREATING APPARATUS
- Publication number 20170221731
- Publication date Aug 3, 2017
- SCREEN Holdings Co., Ltd.
- Atsushi TANAKA
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
SUBSTRATE TREATING APPARATUS AND TREATMENT GAS SUPPLYING NOZZLE
- Publication number 20160281235
- Publication date Sep 29, 2016
- SCREEN Holdings Co., Ltd.
- Yasuhiro FUKUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130084393
- Publication date Apr 4, 2013
- Masahito KASHIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HEAT TREATMENT APPARATUS
- Publication number 20070128889
- Publication date Jun 7, 2007
- Shigehiro Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HEAT TREATMENT APPARATUS
- Publication number 20070128570
- Publication date Jun 7, 2007
- Shigehiro Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HEAT TREATMENT APPARATUS
- Publication number 20070128888
- Publication date Jun 7, 2007
- Shigehiro Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat treatment apparatus
- Publication number 20060292515
- Publication date Dec 28, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Akihiro Hisai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate heat treatment apparatus
- Publication number 20060289432
- Publication date Dec 28, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Akihiko Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Treating solution supply nozzle, a substrate treating apparatus hav...
- Publication number 20060236928
- Publication date Oct 26, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Shigehiro Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat-treating apparatus
- Publication number 20040232136
- Publication date Nov 25, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Akihiro Hisaii
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Treating solution supply nozzle, a substrate treating apparatus hav...
- Publication number 20040226505
- Publication date Nov 18, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Shigehiro Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical treating apparatus
- Publication number 20030141314
- Publication date Jul 31, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Shigehiro Goto
- H01 - BASIC ELECTRIC ELEMENTS

Shigehiro GOTO

Person

Patents Grantslast 30 patents

Thermal processing apparatus and thermal processing method

Substrate treating apparatus and treatment gas supplying nozzle

Substrate processing apparatus and substrate processing method

Substrate heat treatment apparatus

Substrate heat treatment apparatus

Substrate heat treatment apparatus

Treating solution supply nozzle, a substrate treating apparatus hav...

Substrate heat treatment apparatus

Treating solution supply nozzle, a substrate treating apparatus hav...

Chemical treating apparatus

Coating solution applying method and apparatus

Patents Applicationslast 30 patents

THERMAL PROCESSING APPARATUS AND THERMAL PROCESSING METHOD

TREATING LIQUID VAPORIZING APPARATUS AND SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS AND TREATMENT GAS SUPPLYING NOZZLE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE HEAT TREATMENT APPARATUS

SUBSTRATE HEAT TREATMENT APPARATUS

SUBSTRATE HEAT TREATMENT APPARATUS

Heat treatment apparatus

Substrate heat treatment apparatus

Treating solution supply nozzle, a substrate treating apparatus hav...

Heat-treating apparatus

Treating solution supply nozzle, a substrate treating apparatus hav...

Chemical treating apparatus