Shigehiro Hara

Person

Kawasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Drawing data generating method
- Patent number 10,685,435
- Issue date Jun 16, 2020
- NuFlare Technology, Inc.
- Shigehiro Hara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of creating writing data
- Patent number 10,503,860
- Issue date Dec 10, 2019
- NuFlare Technology, Inc.
- Shigehiro Hara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Generating method of drawing data and charged particle beam drawing...
- Patent number 10,445,450
- Issue date Oct 15, 2019
- NuFlare Technology, Inc.
- Shigehiro Hara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Drawing data creation method and charged particle beam drawing appa...
- Patent number 10,199,199
- Issue date Feb 5, 2019
- NuFlare Technology, Inc.
- Shigehiro Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Data processing method, charged particle beam writing method, and c...
- Patent number 10,096,452
- Issue date Oct 9, 2018
- NuFlare Technology, Inc.
- Kenichi Yasui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for generating writing data
- Patent number 9,984,853
- Issue date May 29, 2018
- NuFlare Technology, Inc.
- Shigehiro Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of generating write data, multi charged particle beam writin...
- Patent number 9,558,315
- Issue date Jan 31, 2017
- NuFlare Technology, Inc.
- Kenichi Yasui
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam lithography apparatus, inspection apparatus a...
- Patent number 9,164,044
- Issue date Oct 20, 2015
- NuFlare Technology, Inc.
- Shigehiro Hara
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting overlapping figure, and charged...
- Patent number 8,280,632
- Issue date Oct 2, 2012
- Nuflare Technology, Inc.
- Shinji Sakamoto
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Figure data verification apparatus and method therefor
- Patent number 8,255,441
- Issue date Aug 28, 2012
- Nuflare Technology, Inc.
- Jun Kasahara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam drawing apparatus and proximity effect correc...
- Patent number 8,207,514
- Issue date Jun 26, 2012
- Nuflare Technology, Inc.
- Shigehiro Hara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam drawing method and apparatus
- Patent number 8,188,449
- Issue date May 29, 2012
- Nuflare Technology, Inc.
- Hayato Shibata
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Data verification method, charged particle beam writing apparatus,...
- Patent number 7,949,966
- Issue date May 24, 2011
- Nuflare Technology, Inc.
- Akihito Anpo
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged-particle beam pattern writing method and apparatus with a p...
- Patent number 7,786,453
- Issue date Aug 31, 2010
- Nuflare Technology, Inc.
- Shinji Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Writing error verification method of pattern writing apparatus and...
- Patent number 7,698,682
- Issue date Apr 13, 2010
- Nuflare Technology, Inc.
- Akihito Anpo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Creation method and conversion method of charged particle beam writ...
- Patent number 7,592,611
- Issue date Sep 22, 2009
- Nuflare Technology, Inc.
- Jun Kasahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming pattern writing data by using charged particle beam
- Patent number 7,504,645
- Issue date Mar 17, 2009
- Nuflare Technology, Inc.
- Akihito Anpo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern forming method and pattern forming apparatus
- Patent number 6,806,941
- Issue date Oct 19, 2004
- Kabushiki Kaisha Toshiba
- Soichi Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged beam exposure system
- Patent number 6,566,662
- Issue date May 20, 2003
- Kabushiki Kaisha Toshiba
- Eiji Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming method and pattern forming apparatus
- Patent number 6,335,145
- Issue date Jan 1, 2002
- Kabushiki Kaisha Toshiba
- Soichi Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electron beam exposure apparatus
- Patent number 6,319,642
- Issue date Nov 20, 2001
- Kabushiki Kaisha Toshiba
- Shigehiro Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern forming method and pattern forming apparatus
- Patent number 6,165,652
- Issue date Dec 26, 2000
- Kabushiki Kaisha Toshiba
- Soichi Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for generating exposure data for lithographic apparatus
- Patent number 6,047,116
- Issue date Apr 4, 2000
- Kabushiki Kaisha Toshiba
- Eiji Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming method
- Patent number 6,040,114
- Issue date Mar 21, 2000
- Kabushiki Kaisha Toshiba
- Soichi Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged beam drawing method
- Patent number 5,894,057
- Issue date Apr 13, 1999
- Kabushiki Kaisha Toshiba
- Toshio Yamaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for designing phase-shifting masks with automatization capab...
- Patent number 5,538,815
- Issue date Jul 23, 1996
- Kabushiki Kaisha Toshiba
- Kazuko Oi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF CREATING WRITING DATA
- Publication number 20180285505
- Publication date Oct 4, 2018
- NuFlare Technology, Inc.
- Shigehiro Hara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GENERATING METHOD OF DRAWING DATA AND CHARGED PARTICLE BEAM DRAWING...
- Publication number 20180060474
- Publication date Mar 1, 2018
- NuFlare Technology, Inc.
- Shigehiro HARA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DRAWING DATA GENERATING METHOD
- Publication number 20170193650
- Publication date Jul 6, 2017
- NuFlare Technology, Inc.
- Shigehiro Hara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DATA PROCESSING METHOD, CHARGED PARTICLE BEAM WRITING METHOD, AND C...
- Publication number 20170169994
- Publication date Jun 15, 2017
- NuFlare Technology, Inc.
- Kenichi Yasui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRAWING DATA CREATION METHOD AND CHARGED PARTICLE BEAM DRAWING APPA...
- Publication number 20170018404
- Publication date Jan 19, 2017
- NuFlare Technology, Inc.
- Shigehiro HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND DRAWING DATA GENERATION...
- Publication number 20160284510
- Publication date Sep 29, 2016
- NuFlare Technology, Inc.
- Shigehiro HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR GENERATING WRITING DATA
- Publication number 20160155609
- Publication date Jun 2, 2016
- NuFlare Technology, Inc.
- Shigehiro HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF GENERATING WRITE DATA, MULTI CHARGED PARTICLE BEAM WRITIN...
- Publication number 20160103945
- Publication date Apr 14, 2016
- NuFlare Technology, Inc.
- Kenichi YASUI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS, INSPECTION APPARATUS A...
- Publication number 20130264478
- Publication date Oct 10, 2013
- NuFlare Technology, Inc.
- Shigehiro HARA
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND PROXIMITY EFFECT CORREC...
- Publication number 20110068281
- Publication date Mar 24, 2011
- NuFlare Technology, Inc.
- Shigehiro HARA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM DRAWING METHOD AND APPARATUS
- Publication number 20110012031
- Publication date Jan 20, 2011
- NuFlare Technology, Inc.
- Hayato Shibata
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING OVERLAPPING FIGURE, AND CHARGED...
- Publication number 20090216450
- Publication date Aug 27, 2009
- NuFlare Technology, Inc.
- Shinji SAKAMOTO
- B82 - NANO-TECHNOLOGY
Information Patent Application
DATA VERIFICATION METHOD, CHARGED PARTICLE BEAM WRITING APPARATUS,...
- Publication number 20080221816
- Publication date Sep 11, 2008
- NuFlare Technology, Inc.
- Akihito Anpo
- B82 - NANO-TECHNOLOGY
Information Patent Application
FIGURE DATA VERIFICATION APPARATUS AND METHOD THEREFOR
- Publication number 20080172438
- Publication date Jul 17, 2008
- NuFlare Technology, Inc.
- Jun KASAHARA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WRITING ERROR VERIFICATION METHOD OF PATTERN WRITING APPARATUS AND...
- Publication number 20080046787
- Publication date Feb 21, 2008
- NuFlare Technology, Inc.
- Akihito ANPO
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED-PARTICLE BEAM PATTERN WRITING METHOD AND APPARATUS
- Publication number 20080023655
- Publication date Jan 31, 2008
- NuFlare Technology, Inc.
- Shinji SAKAMOTO
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF FORMING PATTERN WRITING DATA BY USING CHARGED PARTICLE BEAM
- Publication number 20070226675
- Publication date Sep 27, 2007
- NuFlare Technology, Inc.
- Akihito ANPO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CREATION METHOD AND CONVERSION METHOD OF CHARGED PARTICLE BEAM WRIT...
- Publication number 20070053242
- Publication date Mar 8, 2007
- NuFlare Technology, Inc.
- Jun Kasahara
- B82 - NANO-TECHNOLOGY
Information Patent Application
Pattern forming method and pattern forming apparatus
- Publication number 20020045132
- Publication date Apr 18, 2002
- Soichi Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shigehiro Hara

Person

Patents Grantslast 30 patents

Drawing data generating method

Method of creating writing data

Generating method of drawing data and charged particle beam drawing...

Drawing data creation method and charged particle beam drawing appa...

Data processing method, charged particle beam writing method, and c...

Method for generating writing data

Method of generating write data, multi charged particle beam writin...

Charged particle beam lithography apparatus, inspection apparatus a...

Apparatus and method for inspecting overlapping figure, and charged...

Figure data verification apparatus and method therefor

Charged particle beam drawing apparatus and proximity effect correc...

Charged particle beam drawing method and apparatus

Data verification method, charged particle beam writing apparatus,...

Charged-particle beam pattern writing method and apparatus with a p...

Writing error verification method of pattern writing apparatus and...

Creation method and conversion method of charged particle beam writ...

Method of forming pattern writing data by using charged particle beam

Pattern forming method and pattern forming apparatus

Charged beam exposure system

Pattern forming method and pattern forming apparatus

Electron beam exposure apparatus

Pattern forming method and pattern forming apparatus

Method for generating exposure data for lithographic apparatus

Pattern forming method

Charged beam drawing method

Method for designing phase-shifting masks with automatization capab...

Patents Applicationslast 30 patents

METHOD OF CREATING WRITING DATA

GENERATING METHOD OF DRAWING DATA AND CHARGED PARTICLE BEAM DRAWING...

DRAWING DATA GENERATING METHOD

DATA PROCESSING METHOD, CHARGED PARTICLE BEAM WRITING METHOD, AND C...

DRAWING DATA CREATION METHOD AND CHARGED PARTICLE BEAM DRAWING APPA...

CHARGED PARTICLE BEAM DRAWING APPARATUS AND DRAWING DATA GENERATION...

METHOD FOR GENERATING WRITING DATA

METHOD OF GENERATING WRITE DATA, MULTI CHARGED PARTICLE BEAM WRITIN...

CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS, INSPECTION APPARATUS A...

CHARGED PARTICLE BEAM DRAWING APPARATUS AND PROXIMITY EFFECT CORREC...

CHARGED PARTICLE BEAM DRAWING METHOD AND APPARATUS

APPARATUS AND METHOD FOR INSPECTING OVERLAPPING FIGURE, AND CHARGED...

DATA VERIFICATION METHOD, CHARGED PARTICLE BEAM WRITING APPARATUS,...

FIGURE DATA VERIFICATION APPARATUS AND METHOD THEREFOR

WRITING ERROR VERIFICATION METHOD OF PATTERN WRITING APPARATUS AND...

CHARGED-PARTICLE BEAM PATTERN WRITING METHOD AND APPARATUS

METHOD OF FORMING PATTERN WRITING DATA BY USING CHARGED PARTICLE BEAM

CREATION METHOD AND CONVERSION METHOD OF CHARGED PARTICLE BEAM WRIT...

Pattern forming method and pattern forming apparatus