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Shigehiro Suzuki
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Kuwana-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Mass flow rate-controlling apparatus
Patent number
8,112,182
Issue date
Feb 7, 2012
Hitachi Metals, Ltd.
Yasukazu Tokuhisa
G05 - CONTROLLING REGULATING
Information
Patent Grant
Mass flow rate control apparatus, its calibration method and semico...
Patent number
7,979,165
Issue date
Jul 12, 2011
Hitachi Metals, Ltd.
Takao Gotoh
G05 - CONTROLLING REGULATING
Information
Patent Grant
Flow controller and its regulation method
Patent number
7,918,238
Issue date
Apr 5, 2011
Hitachi Metals, Ltd.
Makoto Tanaka
G05 - CONTROLLING REGULATING
Information
Patent Grant
Shutoff valve apparatus and mass flow control device with built-in...
Patent number
7,699,070
Issue date
Apr 20, 2010
Hitachi Metals, Ltd.
Shigehiro Suzuki
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
SHUTOFF VALVE APPARATUS AND MASS FLOW CONTROL DEVICE WITH BUILT-IN...
Publication number
20070240769
Publication date
Oct 18, 2007
Hitachi Metals, Ltd.
Shigehiro Suzuki
G05 - CONTROLLING REGULATING
Information
Patent Application
MASS FLOW RATE CONTROL APPARATUS, ITS CALIBRATION METHOD AND SEMICO...
Publication number
20070233412
Publication date
Oct 4, 2007
HITACHI METALS, LTD
Takao Gotoh
G05 - CONTROLLING REGULATING
Information
Patent Application
Mass flow rate-controlling apparatus
Publication number
20070198131
Publication date
Aug 23, 2007
HITACHI METALS, LTD
Yasukazu Tokuhisa
G05 - CONTROLLING REGULATING
Information
Patent Application
Flow controller and its regulation method
Publication number
20060278276
Publication date
Dec 14, 2006
Makoto Tanaka
G05 - CONTROLLING REGULATING