Shigehiro Ushikubo

Person

Iwate, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film deposition apparatus, film deposition method and storage medium
- Patent number 9,453,280
- Issue date Sep 27, 2016
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus
- Patent number 9,062,373
- Issue date Jun 23, 2015
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Activated gas injector, film deposition apparatus, and film deposit...
- Patent number 9,053,909
- Issue date Jun 9, 2015
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method and film deposition apparatus
- Patent number 8,642,487
- Issue date Feb 4, 2014
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-REA...
- Publication number 20130149467
- Publication date Jun 13, 2013
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS
- Publication number 20130130512
- Publication date May 23, 2013
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD AND STORAGE MEDIUM
- Publication number 20130059415
- Publication date Mar 7, 2013
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND PLAS...
- Publication number 20130047923
- Publication date Feb 28, 2013
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS
- Publication number 20130042813
- Publication date Feb 21, 2013
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESS APPARATUS
- Publication number 20110155057
- Publication date Jun 30, 2011
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER REA...
- Publication number 20110039026
- Publication date Feb 17, 2011
- TOKYO ELECTRON LIMITED
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVATED GAS INJECTOR, FILM DEPOSITION APPARATUS, AND FILM DEPOSIT...
- Publication number 20100055347
- Publication date Mar 4, 2010
- TOKYO ELECTRON LIMITED
- HITOSHI KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shigehiro Ushikubo

Person

Patents Grantslast 30 patents

Film deposition apparatus, film deposition method and storage medium

Film deposition apparatus

Activated gas injector, film deposition apparatus, and film deposit...

Film deposition method and film deposition apparatus

Patents Applicationslast 30 patents

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-REA...

FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD AND STORAGE MEDIUM

FILM DEPOSITION APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND PLAS...

FILM DEPOSITION APPARATUS

PLASMA PROCESS APPARATUS

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER REA...

ACTIVATED GAS INJECTOR, FILM DEPOSITION APPARATUS, AND FILM DEPOSIT...