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Shigekazu Hirose
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Nirasaki-shi, JP
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last 30 patents
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Patent Grant
Etching method and recording medium
Patent number
8,383,519
Issue date
Feb 26, 2013
Tokyo Electron Limited
Toshihisa Nozawa
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ETCHING METHOD AND RECORDING MEDIUM
Publication number
20100279510
Publication date
Nov 4, 2010
TOKYO ELECTRON LIMITED
Toshihisa Nozawa
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Deposition Method, Deposition Apparatus, Computer Readable Medium,...
Publication number
20090085172
Publication date
Apr 2, 2009
TOKYO ELECTRON LIMITED
Masahiro Horigome
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...