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Shigeki Aoki
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Koshi-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Heat processing apparatus and heat processing method
Patent number
8,782,918
Issue date
Jul 22, 2014
Tokyo Electron Limited
Shigeki Aoki
F26 - DRYING
Information
Patent Grant
Heat processing apparatus and heat processing method
Patent number
7,980,003
Issue date
Jul 19, 2011
Tokyo Electron Limited
Shigeki Aoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Thermal processing apparatus
Patent number
7,802,986
Issue date
Sep 28, 2010
Tokyo Electron Limited
Kazuhiko Ooshima
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
HEAT PROCESSING APPARATUS AND HEAT PROCESSING METHOD
Publication number
20110236845
Publication date
Sep 29, 2011
TOKYO ELECTRON LIMITED
Shigeki Aoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HEAT PROCESSING APPARATUS AND HEAT PROCESSING METHOD
Publication number
20070169373
Publication date
Jul 26, 2007
TOKYO ELECTRON LIMITED
Shigeki Aoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
THERMAL PROCESSING APPARATUS
Publication number
20070166655
Publication date
Jul 19, 2007
TOKYO ELECTRON LIMITED
Kazuhiko Ooshima
H01 - BASIC ELECTRIC ELEMENTS