Shigeki Doba

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 11,328,904
- Issue date May 10, 2022
- Tokyo Electron Limited
- Shigeki Doba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,734,201
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Shigeki Doba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching apparatus and plasma etching method
- Patent number 10,090,161
- Issue date Oct 2, 2018
- Tokyo Electron Limited
- Shigeki Doba
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220108913
- Publication date Apr 7, 2022
- TOKYO ELECTRON LIMITED
- Hajime NAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus
- Publication number 20200321195
- Publication date Oct 8, 2020
- TOKYO ELECTRON LIMITED
- Shigeki DOBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND HEAT SHIELD PLATE
- Publication number 20180151380
- Publication date May 31, 2018
- TOKYO ELECTRON LIMITED
- Hiroyuki OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170256382
- Publication date Sep 7, 2017
- Shigeki DOBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
- Publication number 20170133234
- Publication date May 11, 2017
- TOKYO ELECTRON LIMITED
- Shigeki Doba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE MOUNTING TABLE AND PLASMA TREATMENT DEVICE
- Publication number 20140311676
- Publication date Oct 23, 2014
- TOKYO ELECTRON LIMITED
- Hideyuki Hatoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
- Publication number 20140017900
- Publication date Jan 16, 2014
- TOKYO ELECTRON LIMITED
- Shigeki Doba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANNULAR ASSEMBLY FOR PLASMA PROCESSING, PLASMA PROCESSING APPARATUS...
- Publication number 20090229759
- Publication date Sep 17, 2009
- TOKYO ELECTRON LIMITED
- Masahiro OGASAWARA
- H01 - BASIC ELECTRIC ELEMENTS

Shigeki Doba

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Substrate processing apparatus

Plasma etching apparatus and plasma etching method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Substrate Processing Apparatus

SUBSTRATE PROCESSING APPARATUS AND HEAT SHIELD PLATE

SUBSTRATE PROCESSING APPARATUS

PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD

SUBSTRATE MOUNTING TABLE AND PLASMA TREATMENT DEVICE

PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD

ANNULAR ASSEMBLY FOR PLASMA PROCESSING, PLASMA PROCESSING APPARATUS...