Shigeki Nojima

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Defect inspection apparatus and defect inspection method
- Patent number 10,943,048
- Issue date Mar 9, 2021
- TOSHIBA MEMORY CORPORATION
- Kazuhiro Nojima
- G01 - MEASURING TESTING
Information Patent Grant
Mold and mold manufacturing method
- Patent number 10,040,219
- Issue date Aug 7, 2018
- TOSHIBA MEMORY CORPORATION
- Yoko Takekawa
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method of wiring layout, semiconductor device, program for supporti...
- Patent number 9,977,855
- Issue date May 22, 2018
- TOSHIBA MEMORY CORPORATION
- Chikaaki Kodama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of wiring layout, semiconductor device, program for supporti...
- Patent number 9,953,126
- Issue date Apr 24, 2018
- TOSHIBA MEMORY CORPORATION
- Chikaaki Kodama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern shape determining method, pattern shape verifying method, a...
- Patent number 8,885,949
- Issue date Nov 11, 2014
- Kabushiki Kaisha Toshiba
- Shigeki Nojima
- G01 - MEASURING TESTING
Information Patent Grant
Sub-resolution assist feature arranging method and computer program...
- Patent number 8,809,072
- Issue date Aug 19, 2014
- Kabushiki Kaisha Toshiba
- Chikaaki Kodama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor integrated circuit pattern verification method, photo...
- Patent number 8,402,407
- Issue date Mar 19, 2013
- Kabushiki Kaisha Toshiba
- Shigeki Nojima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Dimension assurance of mask using plurality of types of pattern amb...
- Patent number 8,336,004
- Issue date Dec 18, 2012
- Kabushiki Kaisha Toshiba
- Shigeki Nojima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask pattern correcting method, mask pattern inspecting method, pho...
- Patent number 8,142,961
- Issue date Mar 27, 2012
- Kabushiki Kaisha Toshiba
- Toshiya Kotani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for correcting a mask pattern design
- Patent number 8,078,996
- Issue date Dec 13, 2011
- Kabushiki Kaisha Toshiba
- Kyoko Izuha
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Design Pattern correcting method, process proximity effect correcti...
- Patent number 7,949,967
- Issue date May 24, 2011
- Kabushiki Kaisha Toshiba
- Toshiya Kotani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Parameter adjustment method, semiconductor device manufacturing met...
- Patent number 7,934,175
- Issue date Apr 26, 2011
- Kabushiki Kaisha Toshiba
- Toshiya Kotani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor integrated circuit pattern verification method, photo...
- Patent number 7,895,541
- Issue date Feb 22, 2011
- Kabushiki Kaisha Toshiba
- Shigeki Nojima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for verifying mask pattern data, method for manufacturing ma...
- Patent number 7,890,908
- Issue date Feb 15, 2011
- Kabushiki Kaisha Toshiba
- Shigeki Nojima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Mask pattern correcting method, mask pattern inspecting method, pho...
- Patent number 7,794,897
- Issue date Sep 14, 2010
- Kabushiki Kaisha Toshiba
- Toshiya Kotani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Mask pattern preparation method, semiconductor device manufacturing...
- Patent number 7,793,252
- Issue date Sep 7, 2010
- Kabushiki Kaisha Toshiba
- Toshiya Kotani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern data correction method, pattern checking method, pattern ch...
- Patent number 7,788,626
- Issue date Aug 31, 2010
- Kabushiki Kaisha Toshiba
- Shigeki Nojima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern data verification method for semiconductor device, computer...
- Patent number 7,730,445
- Issue date Jun 1, 2010
- Kabushiki Kaisha Toshiba
- Shigeki Nojima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern data verification method, pattern data creation method, exp...
- Patent number 7,600,213
- Issue date Oct 6, 2009
- Kabushiki Kaisha Toshiba
- Shigeki Nojima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for correcting a mask pattern design
- Patent number 7,571,417
- Issue date Aug 4, 2009
- Kabushiki Kaisha Toshiba
- Kyoko Izuha
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Aligner evaluation system, aligner evaluation method, a computer pr...
- Patent number 7,546,178
- Issue date Jun 9, 2009
- Kabushiki Kaisha Toshiba
- Takuya Kouno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Design pattern data preparing method, mask pattern data preparing m...
- Patent number 7,526,748
- Issue date Apr 28, 2009
- Kabushiki Kaisha Toshiba
- Toshiya Kotani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography simulation method and recording medium
- Patent number 7,426,712
- Issue date Sep 16, 2008
- Kabushiki Kaisha Toshiba
- Toshiya Kotani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern correcting method, mask making method, method of manufactur...
- Patent number 7,337,426
- Issue date Feb 26, 2008
- Kabushiki Kaisha Toshiba
- Toshiya Kotani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor integrated circuit pattern verification method, photo...
- Patent number 7,278,125
- Issue date Oct 2, 2007
- Kabushiki Kaisha Toshiba
- Shigeki Nojima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Aligner evaluation system, aligner evaluation method, a computer pr...
- Patent number 7,269,470
- Issue date Sep 11, 2007
- Kabushiki Kaisha Toshiba
- Takuya Kouno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for evaluating photo mask and method for manufacturing semic...
- Patent number 7,229,721
- Issue date Jun 12, 2007
- Kabushiki Kaisha Toshiba
- Shoji Mimotogi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern dimension correction method and verification method using O...
- Patent number 7,213,226
- Issue date May 1, 2007
- Kabushiki Kaisha Toshiba
- Toshiya Kotani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Design layout preparing method
- Patent number 7,194,704
- Issue date Mar 20, 2007
- Kabushiki Kaisha Toshiba
- Toshiya Kotani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus for correcting a plurality of exposure tools, method for...
- Patent number 7,164,960
- Issue date Jan 16, 2007
- Kabushiki Kaisha Toshiba
- Nobuhiro Komine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD
- Publication number 20200089838
- Publication date Mar 19, 2020
- Toshiba Memory Corporation
- Kazuhiro NOJIMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DESIGN METHOD OF WIRING LAYOUT, SEMICONDUCTOR DEVICE, PROGRAM FOR S...
- Publication number 20150021782
- Publication date Jan 22, 2015
- KABUSHIKI KAISHA TOSHIBA
- Chikaaki KODAMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN FORMATION DEVICE, METHOD FOR PATTERN FORMATION, AND PROGRAM...
- Publication number 20140346701
- Publication date Nov 27, 2014
- Sachiko Kobayashi
- B82 - NANO-TECHNOLOGY
Information Patent Application
MOLD AND MOLD MANUFACTURING METHOD
- Publication number 20140284846
- Publication date Sep 25, 2014
- Kabushiki Kaisha Toshiba
- Yoko TAKEKAWA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
DESIGN METHOD OF WIRING LAYOUT, SEMICONDUCTOR DEVICE, PROGRAM FOR S...
- Publication number 20140183702
- Publication date Jul 3, 2014
- KABUSHIKI KAISHA TOSHIBA
- Chikaaki KODAMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DESIGN METHOD OF WIRING LAYOUT, SEMICONDUCTOR DEVICE, PROGRAM FOR S...
- Publication number 20140131879
- Publication date May 15, 2014
- KABUSHIKI KAISHA TOSHIBA
- Chikaaki KODAMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF FORMING DRAWING PATTERN, METHOD OF GENERATING DRAWING DAT...
- Publication number 20130249918
- Publication date Sep 26, 2013
- Kabushiki Kaisha Toshiba
- Yoko TAKEKAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DESIGN METHOD OF WIRING LAYOUT, SEMICONDUCTOR DEVICE, PROGRAM FOR S...
- Publication number 20130168827
- Publication date Jul 4, 2013
- KABUSHIKI KAISHA TOSHIBA
- Chikaaki Kodama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN FORMATION DEVICE, METHOD FOR PATTERN FORMATION, AND PROGRAM...
- Publication number 20130069278
- Publication date Mar 21, 2013
- Sachiko Kobayashi
- B82 - NANO-TECHNOLOGY
Information Patent Application
DESIGN METHOD OF WIRING LAYOUT, SEMICONDUCTOR DEVICE, PROGRAM FOR S...
- Publication number 20130062771
- Publication date Mar 14, 2013
- Kabushiki Kaisha Toshiba
- Chikaaki KODAMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF PREPARING PATTERN, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20120246602
- Publication date Sep 27, 2012
- Sachiko Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF OPTIMIZING SEMICONDUCTOR DEVICE MANUFACTURING PROCESS, ME...
- Publication number 20120198396
- Publication date Aug 2, 2012
- Masanari KAJIWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20120192127
- Publication date Jul 26, 2012
- Kabushiki Kaisha Toshiba
- Satoshi USUI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN SHAPE DETERMINING METHOD, PATTERN SHAPE VERIFYING METHOD, A...
- Publication number 20120076424
- Publication date Mar 29, 2012
- Shigeki NOJIMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LIGHT SOURCE SHAPE CALCULATION METHOD
- Publication number 20120054697
- Publication date Mar 1, 2012
- Kazuhiro TAKAHATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pattern Verification Method, Pattern Verification System, Mask Manu...
- Publication number 20120054695
- Publication date Mar 1, 2012
- KABUBHSIKI KAISHA TOSHIBA
- Kyoko IZUHA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUB-RESOLUTION ASSIST FEATURE ARRANGING METHOD AND COMPUTER PROGRAM...
- Publication number 20110294239
- Publication date Dec 1, 2011
- Chikaaki KODAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK VERIFYING METHOD, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE...
- Publication number 20110201138
- Publication date Aug 18, 2011
- Shigeki Nojima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR INTEGRATED CIRCUIT PATTERN VERIFICATION METHOD, PHOTO...
- Publication number 20110175247
- Publication date Jul 21, 2011
- Kabushiki Kaisha Toshiba
- Shigeki Nojima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN CREATING METHOD, COMPUTER PROGRAM PRODUCT, AND METHOD OF MA...
- Publication number 20110029938
- Publication date Feb 3, 2011
- Shigeki NOJIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN EVALUATING METHOD, PATTERN GENERATING METHOD, AND COMPUTER...
- Publication number 20110029937
- Publication date Feb 3, 2011
- Katsuyoshi KODERA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK PATTERN CORRECTING METHOD, MASK PATTERN INSPECTING METHOD, PHO...
- Publication number 20100159709
- Publication date Jun 24, 2010
- Kabushiki Kaisha Toshiba
- Toshiya KOTANI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and system for correcting a mask pattern design
- Publication number 20090265680
- Publication date Oct 22, 2009
- Kabushiki Kaisha Toshiba
- Kyoko Izuha
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DESIGN PATTERN CORRECTING METHOD, DESIGN PATTERN FORMING METHOD, PR...
- Publication number 20090077530
- Publication date Mar 19, 2009
- Kabushiki Kaisha Toshiba
- TOSHIYA KOTANI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DESIGN PATTERN CORRECTING METHOD, DESIGN PATTERN FORMING METHOD, PR...
- Publication number 20090077529
- Publication date Mar 19, 2009
- Toshiya Kotani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithography simulation method, mask pattern preparation method, sem...
- Publication number 20090019418
- Publication date Jan 15, 2009
- Kabushiki Kaisha Toshiba
- Toshiya Kotani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PARAMETER ADJUSTMENT METHOD, SEMICONDUCTOR DEVICE MANUFACTURING MET...
- Publication number 20080250381
- Publication date Oct 9, 2008
- Toshiya KOTANI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Semiconductor integrated circuit pattern verification method, photo...
- Publication number 20080022244
- Publication date Jan 24, 2008
- Kabushiki Kaisha Toshiba
- Shigeki Nojima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern data verification method for semiconductor device, computer...
- Publication number 20080022240
- Publication date Jan 24, 2008
- Shigeki Nojima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Aligner evaluation system, aligner evaluation method, a computer pr...
- Publication number 20070288113
- Publication date Dec 13, 2007
- Kabushiki Kaisha Toshiba
- Takuya Kouno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shigeki Nojima

Person

Patents Grantslast 30 patents

Defect inspection apparatus and defect inspection method

Mold and mold manufacturing method

Method of wiring layout, semiconductor device, program for supporti...

Method of wiring layout, semiconductor device, program for supporti...

Pattern shape determining method, pattern shape verifying method, a...

Sub-resolution assist feature arranging method and computer program...

Semiconductor integrated circuit pattern verification method, photo...

Dimension assurance of mask using plurality of types of pattern amb...

Mask pattern correcting method, mask pattern inspecting method, pho...

Method and system for correcting a mask pattern design

Design Pattern correcting method, process proximity effect correcti...

Parameter adjustment method, semiconductor device manufacturing met...

Semiconductor integrated circuit pattern verification method, photo...

Method for verifying mask pattern data, method for manufacturing ma...

Mask pattern correcting method, mask pattern inspecting method, pho...

Mask pattern preparation method, semiconductor device manufacturing...

Pattern data correction method, pattern checking method, pattern ch...

Pattern data verification method for semiconductor device, computer...

Pattern data verification method, pattern data creation method, exp...

Method and system for correcting a mask pattern design

Aligner evaluation system, aligner evaluation method, a computer pr...

Design pattern data preparing method, mask pattern data preparing m...

Lithography simulation method and recording medium

Pattern correcting method, mask making method, method of manufactur...

Semiconductor integrated circuit pattern verification method, photo...

Aligner evaluation system, aligner evaluation method, a computer pr...

Method for evaluating photo mask and method for manufacturing semic...

Pattern dimension correction method and verification method using O...

Design layout preparing method

Apparatus for correcting a plurality of exposure tools, method for...

Patents Applicationslast 30 patents

DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD

DESIGN METHOD OF WIRING LAYOUT, SEMICONDUCTOR DEVICE, PROGRAM FOR S...

PATTERN FORMATION DEVICE, METHOD FOR PATTERN FORMATION, AND PROGRAM...

MOLD AND MOLD MANUFACTURING METHOD

DESIGN METHOD OF WIRING LAYOUT, SEMICONDUCTOR DEVICE, PROGRAM FOR S...

DESIGN METHOD OF WIRING LAYOUT, SEMICONDUCTOR DEVICE, PROGRAM FOR S...

METHOD OF FORMING DRAWING PATTERN, METHOD OF GENERATING DRAWING DAT...

DESIGN METHOD OF WIRING LAYOUT, SEMICONDUCTOR DEVICE, PROGRAM FOR S...

PATTERN FORMATION DEVICE, METHOD FOR PATTERN FORMATION, AND PROGRAM...

DESIGN METHOD OF WIRING LAYOUT, SEMICONDUCTOR DEVICE, PROGRAM FOR S...

METHOD OF PREPARING PATTERN, METHOD OF MANUFACTURING SEMICONDUCTOR...

METHOD OF OPTIMIZING SEMICONDUCTOR DEVICE MANUFACTURING PROCESS, ME...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

PATTERN SHAPE DETERMINING METHOD, PATTERN SHAPE VERIFYING METHOD, A...

LIGHT SOURCE SHAPE CALCULATION METHOD

Pattern Verification Method, Pattern Verification System, Mask Manu...

SUB-RESOLUTION ASSIST FEATURE ARRANGING METHOD AND COMPUTER PROGRAM...

MASK VERIFYING METHOD, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE...

SEMICONDUCTOR INTEGRATED CIRCUIT PATTERN VERIFICATION METHOD, PHOTO...

PATTERN CREATING METHOD, COMPUTER PROGRAM PRODUCT, AND METHOD OF MA...

PATTERN EVALUATING METHOD, PATTERN GENERATING METHOD, AND COMPUTER...

MASK PATTERN CORRECTING METHOD, MASK PATTERN INSPECTING METHOD, PHO...

Method and system for correcting a mask pattern design

DESIGN PATTERN CORRECTING METHOD, DESIGN PATTERN FORMING METHOD, PR...

DESIGN PATTERN CORRECTING METHOD, DESIGN PATTERN FORMING METHOD, PR...

Lithography simulation method, mask pattern preparation method, sem...

PARAMETER ADJUSTMENT METHOD, SEMICONDUCTOR DEVICE MANUFACTURING MET...

Semiconductor integrated circuit pattern verification method, photo...

Pattern data verification method for semiconductor device, computer...

Aligner evaluation system, aligner evaluation method, a computer pr...