Shigeki Ogawa

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Measuring apparatus, drawing apparatus, and article manufacturing m...
- Patent number 8,927,949
- Issue date Jan 6, 2015
- Canon Kabushiki Kaisha
- Shigeki Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing device, and substrate
- Patent number 8,922,774
- Issue date Dec 30, 2014
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method wherein alignment is carried out by c...
- Patent number 5,751,404
- Issue date May 12, 1998
- Canon Kabushiki Kaisha
- Eiichi Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 4,814,829
- Issue date Mar 21, 1989
- Canon Kabushiki Kaisha
- Masao Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20160011519
- Publication date Jan 14, 2016
- Canon Kabushiki Kaisha
- Shigeki Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150380214
- Publication date Dec 31, 2015
- Canon Kabushiki Kaisha
- Shigeki Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150362842
- Publication date Dec 17, 2015
- Canon Kabushiki Kaisha
- Shigeki Ogawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150364291
- Publication date Dec 17, 2015
- Canon Kabushiki Kaisha
- Shigeki Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD, AND METHOD OF MANUFACTURING AN AR...
- Publication number 20150325404
- Publication date Nov 12, 2015
- Canon Kabushiki Kaisha
- Yusuke Sugiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130188165
- Publication date Jul 25, 2013
- Canon Kabushiki Kaisha
- Shigeki Ogawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130148091
- Publication date Jun 13, 2013
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING DEVICE, AND SUBSTRATE
- Publication number 20130148122
- Publication date Jun 13, 2013
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASURING APPARATUS, DRAWING APPARATUS, AND ARTICLE MANUFACTURING M...
- Publication number 20130017476
- Publication date Jan 17, 2013
- Canon Kabushiki Kaisha
- Shigeki OGAWA
- H01 - BASIC ELECTRIC ELEMENTS

Shigeki Ogawa

Person

Patents Grantslast 30 patents

Measuring apparatus, drawing apparatus, and article manufacturing m...

Method of manufacturing device, and substrate

Exposure apparatus and method wherein alignment is carried out by c...

Projection exposure apparatus

Patents Applicationslast 30 patents

LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHY APPARATUS AND METHOD, AND METHOD OF MANUFACTURING AN AR...

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHY APPARATUS AND METHOD, AND METHOD OF MANUFACTURING ARTICLE

METHOD OF MANUFACTURING DEVICE, AND SUBSTRATE

MEASURING APPARATUS, DRAWING APPARATUS, AND ARTICLE MANUFACTURING M...