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SHIGEKI SUKEGAWA
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Hitachinaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Recipe creation device for use in semiconductor measurement device...
Patent number
10,984,143
Issue date
Apr 20, 2021
HITACHI HIGH-TECH CORPORATION
Hiromi Fujita
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method of OPC model building, information-processing apparatus, and...
Patent number
8,788,981
Issue date
Jul 22, 2014
Hitachi High-Technologies Corporation
Mihoko Kijima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for adjusting imaging magnification and charged particle bea...
Patent number
8,552,371
Issue date
Oct 8, 2013
Hitachi High-Technologies Corporation
Shigeki Sukegawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for adjusting imaging magnification and charged particle bea...
Patent number
7,834,316
Issue date
Nov 16, 2010
Hitachi High-Technologies Corporation
Shigeki Sukegawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Recipe Creation Device for Use in Semiconductor Measurement Device...
Publication number
20170371981
Publication date
Dec 28, 2017
Hitachi High-Technologies Corporation
Hiromi FUJITA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Template Creation Device for Sample Observation Device, and Sample...
Publication number
20160140287
Publication date
May 19, 2016
Hitachi High-Technologies Corporation
Yuki OJIMA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR ADJUSTING IMAGING MAGNIFICATION AND CHARGED PARTICLE BEA...
Publication number
20110042568
Publication date
Feb 24, 2011
Hitachi High-Technologies Corporation
SHIGEKI SUKEGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of OPC Model Building, Information-Processing Apparatus, and...
Publication number
20080250380
Publication date
Oct 9, 2008
Hitachi High-Technologies Corporation
Mihoko Kijima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR ADJUSTING IMAGING MAGNIFICATION AND CHARGED PARTICLE BEA...
Publication number
20080217529
Publication date
Sep 11, 2008
Shigeki SUKEGAWA
H01 - BASIC ELECTRIC ELEMENTS