Shigeki Takahashi

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma etching method, plasma etching device, and method for produc...
- Patent number 8,986,558
- Issue date Mar 24, 2015
- Japan Science and Technology Agency
- Susumu Noda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Three-dimensional photonic crystal and its manufacturing method the...
- Patent number 8,009,953
- Issue date Aug 30, 2011
- Kyoto University
- Susumu Noda
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING METHOD, PLASMA ETCHING DEVICE, AND METHOD FOR PRODUC...
- Publication number 20110151673
- Publication date Jun 23, 2011
- Japan Science and Technology Agency
- Susumu Noda
- G02 - OPTICS
Information Patent Application
Three-Dimensional Photonic Crystal and its Manufacturing Method The...
- Publication number 20080131660
- Publication date Jun 5, 2008
- Kyoto University
- Susumu Noda
- G02 - OPTICS